Mkpuchi ion vacuum (nke a na-akpọ ion plating) bụ United States na 1963 ụlọ ọrụ Somdia DM Mattox tụrụ aro na afọ 1970 abụrụla mmepe ngwa ngwa nke teknụzụ ọgwụgwọ elu ọhụrụ. Ọ na-ezo aka na iji isi iyi evaporation ma ọ bụ ihe mgbaru ọsọ sputtering n'ime ikuku vacuum ka ihe nkiri ahụ wee wụpụ ma ọ bụ wụpụ, evaporation ma ọ bụ wụpụ site na akụkụ nke ihe ndị dị na oghere mwepụ gas ghọọ ion metal.
A na-etinye ihe ndị a n'elu ihe ndị dị n'okpuru ala n'okpuru ọrụ nke ubi eletriki iji mepụta usoro ihe nkiri dị gịrịgịrị.
A ga-ekewa mkpuchi ion vacuum dị iche iche, nke a na-ejikarị ihe mkpuchi akpụkpọ ahụ emepụta isi iyi ion n'ụdị abụọ: mkpuchi ion nke ụdị isi iyi evaporation na mkpuchi ion nke ụdị ebumnuche sputtering. A na-ekpochapụ nke mbụ site na ikpo ọkụ ihe nkiri ahụ iji mepụta vapors ígwè, nke mere na a na-agbanwe ya ka ọ bụrụ ion nke ígwè na atọm na-anọpụ iche dị elu n'ime oghere plasma nke gas na-ewepụta, site na ọrụ nke ubi eletrik iji ruo na substrate iji mepụta fim dị gịrịgịrị; nke ikpeazụ bụ iji ion ike dị elu (dịka ọmụmaatụ, Ar +) n'elu ihe nkiri ahụ iji mee ka sputtering si na ihe ndị ahụ pụta site na oghere nke gas na-agbapụ ion n'ime ion ma ọ bụ atọm na-anọpụ iche dị elu, iji ruo n'elu ihe mkpuchi ahụ wee mepụta fim ahụ.
–E bipụtara akụkọ a site n'aka onyeigwe mkpuchi igwe emeputa ihe mkpuchiGuangdong Zhenhua
Oge ozi: Maachị-07-2024