① Ubuchwepheshe bosizo lwe-ion beam bubonakala ngokunamathela okuqinile phakathi kwefilimu ne-substrate, isendlalelo sefilimu siqine kakhulu. Ukuhlola kubonise ukuthi: ugongolo lwe-ion lusize ukunamathela kokunamathela kunokunamathela kokumiswa komhwamuko oshisayo kukhuphuke izikhathi eziningana kuya emakhulwini ezikhathi, isizathu sibangelwa ikakhulukazi ukuqhunyiswa kwe-ion ebusweni bomphumela wokuhlanza, ukuze isixhumi esibonakalayo sesisekelo se-membrane senze ukwakheka okuhlangene kobuso, noma ungqimba lwenguquko oluyingxubevange, kanye nokunciphisa ukucindezeleka kolwelwesi.
② Ukufakwa kwe-ion beam kungathuthukisa izici zemishini zefilimu, kunwebe impilo yokukhathala, kulungele kakhulu ukulungiswa kwama-oxides, ama-carbides, i-cubic BN, i-TiB: nezingubo ezifana nedayimane. Isibonelo, ku-1Crl8Ni9Ti insimbi ekwazi ukumelana nokushisa ekusetshenzisweni kobuchwepheshe bokufakwa kwe-ion beam-assisted deposition ukuze kukhule i-200nm SiN, ifilimu encane, hhayi nje kuphela engavimbela ukuvela kwemifantu yokukhathala ebusweni bezinto ezibonakalayo, kodwa futhi inganciphisa kakhulu izinga lokusabalalisa ukukhathala, ukunweba ukuphila kwayo kunendima enhle.
③ Ukufakwa okusizwa kwe-ion beam kungashintsha imvelo yengcindezi yefilimu kanye noshintsho lwesakhiwo sayo sekristalu. Isibonelo, ukulungiswa kwefilimu ye-Cr ene-11.5keV Xe + noma i-Ar + bombardment yendawo engaphansi, ithole ukuthi ukulungiswa kwezinga lokushisa le-substrate, amandla e-bhomu ye-ion, i-ion kanye nesilinganiso sokufika kwe-athomu namanye amapharamitha, kungenza ingcindezi isuke ekucindezelekeni iye ekucindezelekeni okucindezelayo, ukwakheka kwekristalu kwefilimu nakho kuzoveza izinguquko. Ngaphansi kwesilinganiso esithile sama-ion kuya kuma-athomu, i-ion beam esiza ukubekwa inomumo okhethayo ongcono kunesendlalelo solwelwesi olufakwe ukufakwa komhwamuko oshisayo.
④ Usizo lwe-ion beam lungathuthukisa ukumelana nokugqwala kanye nokumelana ne-oxidation kolwelwesi. Njengoba ugongolo lwe-ion lusiza ukubekwa kolwelwesi longqimba luminyene, ukuthuthukiswa kwesakhiwo sesisekelo se-membrane ukuthuthukiswa noma ukwakheka kwesimo se-amorphous okubangelwa ukunyamalala komngcele wokusanhlamvu phakathi kwezinhlayiya, okulungele ukuthuthukisa ukumelana nokugqwala kanye nokumelana ne-oxidation yento.
Thuthukisa ukumelana nokugqwala kwezinto futhi umelane nomphumela we-oxidizing wokushisa okuphezulu.
(5) Ukufakwa okusizwa kwe-ion beam kungashintsha izici ze-electromagnetic zefilimu futhi kuthuthukise ukusebenza kwamafilimu amancane abonakalayo. (6) Ukufakwa okusizwa yi-ion kuvumela ukukhula kwamafilimu ahlukahlukene azacile emazingeni okushisa aphansi futhi kugweme imiphumela emibi ezintweni noma ezingxenyeni ezinembayo ezingabangelwa ukwelashwa emazingeni okushisa aphezulu, njengoba imingcele ehlobene nokufakwa kwe-athomu nokufakwa kwe-ion ingalungiswa ngokunembile nangokuzimela, futhi ukumbozwa kwama-micrometer ambalwa okubunjwa okungaguquguquki kungenziwa ngokuqhubekayo amandla aphansi.
Isikhathi sokuthumela: Mar-07-2024