Ikoranabuhanga ryo Gushyira Ion Beam mu Biti

① Ikoranabuhanga ryo gushyiramo imirasire ya Ion rirangwa no gufatana gukomeye hagati ya firime n'igice cy'inyuma, urwego rwa firime rurakomeye cyane. Igerageza ryagaragaje ko: gushyiramo imirasire ya Ion bifasha gushyiramo imirasire ya Ion kurusha gufatana kw'umwuka w'ubushyuhe byiyongera inshuro nyinshi kugeza ku nshuro amagana, impamvu ahanini iterwa no gukubitana kwa ion ku buso bw'ingaruka zo gusukura, ku buryo aho membrane ihurira hakora imiterere y'intera y'urukiramende, cyangwa urwego rw'impinduka rwa hybrid, ndetse no kugabanya umuvuduko w'urukiramende.

② Gushyiramo icyuma gifasha icyuma cya Ion bishobora kunoza imiterere ya mashini ya filime, kongera igihe cyo kunanirwa, bikaba byiza cyane mu gutegura ogiside, karubide, cubic BN, TiB: n'imyambaro isa na diyama. Urugero, mu cyuma kidashyuha cya 1Crl8Ni9Ti, hakoreshejwe ikoranabuhanga rifasha icyuma gukwirakwiza icyuma cya Ion kugira ngo gikure 200nm SiN, icyuma gito, ntabwo gishobora gusa gukumira kugaragara kw'imivu y'umunaniro ku buso bw'ibikoresho, ahubwo gishobora no kugabanya cyane umuvuduko w'imivu y'umunaniro, kugira ngo cyongere igihe cyo kurangira gifite uruhare rwiza.

③ Gushyiramo imirasire ya Ion bishobora guhindura imiterere y'umuvuduko wa firime n'imiterere yayo ya kristu bihinduka. Urugero, gutegura firime ya Cr ifite 11.5keV Xe + cyangwa Ar + ku buso bwa substrate, byagaragaye ko guhindura ubushyuhe bwa substrate, ingufu za ion za bombardment, ikigereranyo cya iyoni na atome hamwe n'ibindi bipimo, bishobora gutuma umuvuduko uva ku gukurura ukagera ku muvuduko wo gukanda, imiterere ya kristu ya firime nayo izatanga impinduka. Mu gihe hari igipimo runaka cya iyoni kuri atome, imiterere ya ion ifashijwe mu gushyiramo imirasire ya Ion ifite icyerekezo cyiza kuruta urwego rwa membrane rushyirwa mu gushyiramo umwuka w'ubushyuhe.

④ Gushyira icyuma gifasha icyuma gukurura icyuma bishobora kongera ubushobozi bwo kurwanya ingese no kurwanya ogisijeni y'icyuma. Kubera ko icyuma gifasha icyuma gukurura icyuma gukurura icyuma gikurura icyuma ari kinini, imiterere y'inkingi y'icyuma irushaho kuba myiza cyangwa ihinduka ry'imiterere idahinduka bitewe no kubura k'umupaka w'ibice biri hagati y'uduce, ibyo bikaba bituma ibikoresho birushaho kugira ubushobozi bwo kurwanya ingese no kurwanya ogisijeni.

Ongera ubushobozi bwo kurwanya ingese mu bikoresho kandi urwanye ingaruka zo gukaraba z’ubushyuhe bwinshi.

(5) Gushyiramo icyuma gifasha amashanyarazi muri firime bishobora guhindura imiterere ya electromagnetic ya firime no kunoza imikorere ya firime ntoya. (6) Gushyiramo icyuma gifasha amashanyarazi muri firime bituma firime ntoya zitandukanye zikura ku bushyuhe buke kandi birinda ingaruka mbi ku bikoresho cyangwa ibice by’ubuziranenge byaterwa no kuvurwa ku bushyuhe bwinshi, kubera ko ibipimo bijyanye no gushyiramo atome no gushyiramo ion bishobora guhindurwa neza kandi ku giti cyabyo, kandi irangi rya mikorometero nke zifite imiterere ihamye rishobora gukorwa buri gihe ku ngufu nke za bombardment.