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Fasahar Bayyanar Ion Beam

Tushen labarin: injin tsabtace iska na Zhenhua
Karanta: 10
An buga: 24-03-07

① Fasahar adana ion ta hanyar amfani da hasken rana tana da alaƙa da mannewa mai ƙarfi tsakanin fim ɗin da substrate, layin fim ɗin yana da ƙarfi sosai. Gwaje-gwaje sun nuna cewa: mannewar ion ta hanyar amfani da hasken rana fiye da mannewar tururin zafi ya ƙaru sau da yawa zuwa ɗaruruwan sau, dalilin shine galibi saboda fashewar ion a saman tasirin tsaftacewa, don haka haɗin tushen membrane don samar da tsarin haɗin gwiwa mai sauƙi, ko kuma Layer na canji mai haɗaka, da kuma rage damuwa na membrane.

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② Ragewar da aka yi wa ion beam na taimakawa wajen adanawa zai iya inganta halayen injina na fim ɗin, ya tsawaita tsawon lokacin gajiya, ya dace sosai don shirya oxides, carbides, cubic BN, TiB: da kuma rufin lu'u-lu'u. Misali, a cikin ƙarfe mai jure zafi na 1Crl8Ni9Ti akan amfani da fasahar adanawa ta ion beam don haɓaka 200nm SiN, fim mai siriri, ba wai kawai zai iya hana fitowar fasawar gajiya a saman kayan ba, har ma yana iya rage yawan yaɗuwar fasawar gajiya sosai, don tsawaita tsawon rayuwarsa yana da kyakkyawan rawa.

③ Ragewar ion da aka taimaka wa hasken rana zai iya canza yanayin damuwa na fim ɗin kuma tsarinsa na lu'ulu'u yana canzawa. Misali, shirya fim ɗin Cr tare da 11.5keV Xe + ko Ar + na bam ɗin saman substrate, ya gano cewa daidaita zafin substrate, kuzarin ion na bam ɗin, rabon isowar ion da atom da sauran sigogi, na iya sa damuwa daga tensile zuwa matsin lamba, tsarin lu'ulu'u na fim ɗin zai kuma haifar da canje-canje. A ƙarƙashin wani rabo na ions zuwa atom, ajiyar ion da aka taimaka wa hasken rana yana da mafi kyawun yanayin zaɓi fiye da layin membrane da aka ajiye ta hanyar ajiyar tururi mai zafi.

④ Ragewar ion da aka taimaka wa ion na iya ƙara juriyar tsatsa da juriyar sharar gida. Ganin cewa ion da aka taimaka wa ion na Layer ɗin membrane yana da yawa, tsarin haɗin tushen membrane yana inganta ko kuma samuwar yanayin rashin tsari wanda ya haifar da ɓacewar iyakar hatsi tsakanin ƙwayoyin, wanda ke taimakawa wajen haɓaka juriyar tsatsa da juriyar sharar gida na kayan.

Ƙara juriyar tsatsa na kayan kuma ka jure tasirin iskar oxygen na zafin jiki mai yawa.

(5) Ragewar da aka yi wa ion beam na iya canza halayen lantarki na fim ɗin da kuma inganta aikin fina-finan siririn gani. (6) Ragewar da aka yi wa ion ta hanyar taimakawa wajen samar da siraran fim daban-daban a ƙananan yanayin zafi kuma tana guje wa mummunan tasirin da zai iya faruwa ga kayan aiki ko sassan da suka dace waɗanda magani zai haifar a yanayin zafi mai yawa, tunda ana iya daidaita sigogin da suka shafi tarawar atomic da dasa ion daidai da kuma daban-daban, kuma ana iya samar da rufin wasu micrometers tare da daidaiton abun da ke ciki akai-akai a ƙananan ƙarfin fashewa.


Lokacin Saƙo: Maris-07-2024