Teknụzụ Nnyefe Ion Beam

① A na-eji ike njikọ siri ike n'etiti ihe nkiri ahụ na ihe mkpuchi ahụ mara teknụzụ ntinye ion nke na-enyere aka na ntinye ion, oyi akwa ihe nkiri ahụ siri ike nke ukwuu. Nnwale egosila na: ntinye ion nke na-enyere aka na ntinye ion nke njikọ karịa njikọta nke ntinye ion okpomọkụ mụbara ọtụtụ ugboro ruo ọtụtụ narị ugboro, ihe kpatara ya bụ isi n'ihi bọmbụ ion n'elu mmetụta nhicha ahụ, nke mere na njikọ isi membrane ahụ ga-emepụta nhazi interfacial gradient, ma ọ bụ oyi akwa mgbanwe ngwakọ, yana ibelata nrụgide nke akpụkpọ ahụ.

② Ntinye aka nke ion beam nwere ike imeziwanye ihe eji arụ ọrụ nke ihe nkiri ahụ, ịgbatị ndụ ike ọgwụgwụ, nke dabara adaba maka nkwadebe nke oxides, carbides, cubic BN, TiB: na mkpuchi dị ka diamond. Dịka ọmụmaatụ, na 1Crl8Ni9Ti ígwè na-eguzogide okpomọkụ na iji teknụzụ ntinye aka nke ion beam iji too 200nm SiN, ihe nkiri dị gịrịgịrị, ọ bụghị naanị na ọ nwere ike igbochi mpụta nke mgbawa ike ọgwụgwụ n'elu ihe ahụ, kamakwa ọ nwere ike ibelata ọnụego mgbasa nke ike ọgwụgwụ, ịgbatị ndụ ya nwere ezigbo ọrụ.

③ Ntinye ion nke enyere aka na oghere nwere ike ịgbanwe ụdị nrụgide nke ihe nkiri ahụ na mgbanwe nhazi kristal ya. Dịka ọmụmaatụ, nkwadebe nke ihe nkiri Cr na 11.5keV Xe + ma ọ bụ Ar + nke bọmbụ elu substrate, chọpụtara na mgbanwe nke okpomọkụ substrate, ike ion bombardment, ion na atom arrival ratio na paramita ndị ọzọ, nwere ike ime ka nrụgide site na nrụgide ruo nrụgide, nhazi kristal nke ihe nkiri ahụ ga-emepụtakwa mgbanwe. N'okpuru oke ụfọdụ nke ion na atom, ntinye ion enyere aka na oghere nwere nhazi nhọrọ ka mma karịa oyi akwa akpụkpọ ahụ nke nkwụnye uzuoku okpomọkụ debere.

④ Ntinye aka nke ion beam nwere ike ime ka iguzogide nchara na iguzogide oxidation nke akpụkpọ ahụ dịkwuo mma. Ebe ọ bụ na ntinye aka nke ion beam nke oyi akwa akpụkpọ ahụ dị oke, nhazi njikọ isi nke membrane na-emeziwanye ma ọ bụ guzobe ọnọdụ amorphous nke sitere na mfu nke ókèala ọka dị n'etiti ihe ndị ahụ, nke na-enyere aka ime ka iguzogide oxidation na oxidation nke ihe ahụ dịkwuo mma.

Mee ka ihe ahụ ghara ịdị ọcha ma gbochie mmetụta oxidation nke okpomọkụ dị elu.

(5) Ntinye ion nke enyere aka na ion nwere ike ịgbanwe ihe onwunwe elektrọnik nke ihe nkiri ahụ ma melite arụmọrụ nke ihe nkiri dị gịrịgịrị anya. (6) Ntinye ion nke enyere aka na ion na-enye ohere itolite nke ihe nkiri dị gịrịgịrị dị iche iche na obere okpomọkụ ma zere mmetụta ọjọọ na ihe ma ọ bụ akụkụ ziri ezi nke ọgwụgwọ ga-akpata na okpomọkụ dị elu, ebe ọ bụ na enwere ike ịgbanwe paramita ndị metụtara ntinye ion na ntinye ion nke ọma na n'adabereghị onwe ya, a pụkwara ịmepụta mkpuchi nke obere micrometers ole na ole nwere nhazi na-agbanwe agbanwe mgbe niile na ike bọmbụ dị ala.