Kev Siv Tshuab Ion Beam Deposition

① Ion beam pab deposition thev naus laus zis yog tus cwj pwm los ntawm kev sib txuas zoo ntawm zaj duab xis thiab lub substrate, txheej zaj duab xis muaj zog heev. Kev sim tau qhia tias: ion beam pab deposition ntawm adhesion dua li qhov adhesion ntawm thermal vapor deposition nce ntau zaus mus rau ntau pua zaus, qhov laj thawj yog vim ion bombardment ntawm qhov chaw ntawm cov nyhuv ntxuav, yog li ntawd lub hauv paus membrane interface los tsim cov qauv gradient interfacial, lossis hybrid hloov txheej, nrog rau kev txo qhov kev ntxhov siab ntawm daim nyias nyias.

② Ion beam pab deposition tuaj yeem txhim kho cov khoom siv kho tshuab ntawm zaj duab xis, ntev lub neej qaug zog, zoo heev rau kev npaj cov oxides, carbides, cubic BN, TiB: thiab pob zeb diamond-zoo li txheej. Piv txwv li, hauv 1Crl8Ni9Ti cov hlau tiv taus cua sov siv cov thev naus laus zis ion beam pab deposition los loj hlob 200nm SiN, zaj duab xis nyias, tsis tsuas yog tuaj yeem tiv thaiv kev tshwm sim ntawm cov kab nrib pleb qaug zog ntawm qhov chaw ntawm cov khoom, tab sis kuj tuaj yeem txo qhov nrawm ntawm kev tawg qaug zog, kom ntev nws lub neej muaj lub luag haujlwm zoo.

③ Ion beam pab deposition tuaj yeem hloov qhov xwm txheej ntawm zaj duab xis thiab nws cov qauv crystalline hloov pauv. Piv txwv li, kev npaj Cr zaj duab xis nrog 11.5keV Xe + lossis Ar + bombardment ntawm qhov chaw substrate, pom tias kev hloov kho ntawm qhov kub ntawm substrate, bombardment ion zog, ion thiab atom tuaj txog piv thiab lwm yam kev ntsuas, tuaj yeem ua rau kev ntxhov siab los ntawm tensile mus rau compressive kev ntxhov siab, cov qauv siv lead ua ntawm zaj duab xis kuj tseem yuav tsim kev hloov pauv. Nyob rau hauv ib qho piv ntawm ions rau atoms, ion beam pab deposition muaj kev xaiv zoo dua li txheej membrane tso los ntawm thermal vapor deposition.

④ Ion beam pab deposition tuaj yeem txhim kho qhov corrosion tsis kam thiab oxidation tsis kam ntawm daim nyias nyias. Vim tias ion beam pab deposition ntawm daim nyias nyias txheej yog ntom, qhov kev txhim kho ntawm daim nyias nyias interface qauv lossis tsim ntawm amorphous lub xeev tshwm sim los ntawm kev ploj ntawm cov ciam teb ntawm cov khoom me me, uas yog qhov zoo rau kev txhim kho ntawm corrosion tsis kam thiab oxidation tsis kam ntawm cov khoom.

Txhim kho qhov corrosion tsis kam ntawm cov khoom thiab tiv taus cov nyhuv oxidizing ntawm qhov kub siab.

(5) Kev siv Ion beam pab deposition tuaj yeem hloov cov khoom siv electromagnetic ntawm zaj duab xis thiab txhim kho kev ua haujlwm ntawm cov yeeb yaj kiab nyias nyias. (6) Kev siv Ion pab deposition tso cai rau kev loj hlob ntawm ntau yam yeeb yaj kiab nyias nyias ntawm qhov kub qis thiab zam cov teebmeem tsis zoo rau cov ntaub ntawv lossis cov khoom siv precision uas yuav tshwm sim los ntawm kev kho mob ntawm qhov kub siab, txij li cov kev ntsuas cuam tshuam nrog atomic deposition thiab ion implantation tuaj yeem hloov kho kom raug thiab ywj pheej, thiab cov txheej txheem ntawm ob peb micrometers nrog cov khoom sib xws tuaj yeem tsim tau tas li ntawm lub zog bombardment qis.