Icoating ye-vacuum ion (ekubhekiselwa kuyo njenge-ion plating) yi-United States ngo-1963 yinkampani yaseSomdia iDM Mattox ecetywayo, i-1970s ibe luphuhliso olukhawulezayo lwetekhnoloji entsha yonyango lomphezulu. Ibhekiselele kusetyenziso lomthombo womphunga okanye into ekujoliswe kuyo yokufafaza kwindawo efunxayo ukwenzela ukuba imathiriyeli yefilim ibe ngumphunga okanye ukufafaza, ukuba ngumphunga okanye ukufafaza kuphuma kwindawo yamasuntswana akwisithuba sokukhupha irhasi eyenzelwe iayoni yesinyithi.
Ezi ngqungquthela zifakwe kwi-substrate phantsi kwesenzo sentsimi yombane ukuvelisa inkqubo yefilimu encinci.
Vacuum ion plating iintlobo ezininzi, ngokwesiqhelo ngokwesixhobo inwebu ukuvelisa umthombo ion ziya kwahlulwa zibe ziindidi ezimbini: evaporation umthombo uhlobo ion plating kunye sputtering uhlobo ion plating. Eyangaphambili ingumphunga ngokufudumeza izinto zefilimu ukuvelisa imiphunga yesinyithi, ukuze ifakwe i-ionized ibe yimiphunga yesinyithi kunye ne-athomu ephezulu yamandla engathathi hlangothi kwisithuba seplasma yokukhutshwa kwegesi, ngendima yentsimi yombane ukufikelela kwi-substrate ukuvelisa iifilimu ezibhityileyo; le yokugqibela kukusetyenziswa ion amandla aphezulu (umzekelo, Ar +) kumphezulu wefilimu imathiriyeli bombardment ukwenza ukuphalaza ngaphandle kwamasuntswana ngokusebenzisa isithuba sokukhutshwa kwerhasi ionized zibe ion okanye iiathom eziphezulu-eneji ezingathathi hlangothi, ukufikelela kumphezulu we-substrate kunye nokuvelisa ifilimu.
–Eli nqaku likhutshwa nguumenzi womatshini wokugqumaGuangdong Zhenhua
Ixesha lokuposa: Mar-07-2024