① Itekhnoloji yokuncedisa i-ion ibonakaliswe ngokunamathela okuqinileyo phakathi kwefilimu kunye ne-substrate, umaleko wefilimu womelele kakhulu. Iimvavanyo zibonise ukuba: i-ion beam incedise ukugxilwa kokunamathela kunokuba i-adhesion of thermal vapour deposition inyuke kaninzi ukuya kumakhulu amaxesha, isizathu sibangelwa ubukhulu becala kwi-ion bombardment kumphezulu wesiphumo sokucoca, ukwenzela ukuba ujongano lwesiseko se-membrane yenze i-gradient interfacial structure, okanye i-hybrid transition layer, kunye nokunciphisa uxinzelelo lwe-membrane.
② I-Ion beam incedise i-deposition inokuphucula i-mechanical properties yefilimu, yandise ubomi bokudinwa, ifaneleke kakhulu ukulungiselela i-oxides, i-carbides, i-cubic BN, i-TiB: kunye neengubo ezinjenge-diamond. Umzekelo, kwi-1Crl8Ni9Ti intsimbi ekwazi ukumelana nobushushu ekusetyenzisweni kweteknoloji ye-ion beam-assisted deposition ukuze ikhule i-200nm SiN, ifilimu ebhityileyo, ayinakunqanda kuphela ukuvela kweentanda zokudinwa kumphezulu wezinto eziphathekayo, kodwa inokunciphisa kakhulu izinga lokusabalalisa ukukhathala, ukwandisa ubomi bayo kunendima enhle.
③ Umqadi oncediswayo we-Ion unokutshintsha uhlobo loxinzelelo lwefilimu kunye notshintsho lwesakhiwo sekristale. Ngokomzekelo, ukulungiswa kwefilimu ye-Cr kunye ne-11.5keV Xe + okanye i-Ar + bombardment ye-substrate surface, yafumanisa ukuba ukulungiswa kobushushu be-substrate, amandla e-bhomu ye-ion, i-ion kunye ne-athomu yokufika kwe-athomu kunye nezinye iiparitha, zingenza uxinzelelo olusuka kwi-tensile ukuya kwi-compressive stress, i-crystal structure yefilimu nayo iya kuvelisa utshintsho. Ngaphantsi komlinganiselo othile we-ion ukuya kwi-athom, i-ion beam encediswayo yokubeka inokhetho olungcono olukhethayo kunomaleko we-membrane ofakwe yi-thermal vapor deposition.
④ Umqadi oncediswayo we-Ion unokwandisa ukuxhathisa ukubola kunye nokumelana ne-oxidation yenwebu. Njengoko i-ion beam incedise ukubekwa kwe-membrane ye-membrane i-dense, i-membrane yesiseko se-interface yophuculo okanye ukubunjwa kwe-amorphous state ebangelwa ukunyamalala komda wengqolowa phakathi kwamasuntswana, okulungelelaniswa nokwandiswa kokumelana nokubola kunye nokumelana ne-oxidation yezinto.
Ukuphucula ukuxhathisa kwe-corrosion yezinto eziphathekayo kwaye uxhathise umphumo we-oxidizing wokushisa okuphezulu.
(5) I-ion beam encediswayo yokubeka inokutshintsha iipropathi ze-electromagnetic zefilimu kwaye iphucule ukusebenza kweefilimu ezibhityileyo ezibonakalayo. (6) I-ion-assisted deposition ivumela ukukhula kweefilimu ezibhityileyo ezahlukeneyo kumaqondo aphantsi kwaye ithintele iziphumo ezibi kwizinto eziphathekayo okanye kwiindawo ezichanekileyo eziya kubangelwa unyango kumaqondo okushisa aphezulu, kuba iiparitha ezinxulumene nokufakwa kwe-athomu kunye nokufakelwa kwe-ion zinokuhlengahlengiswa ngokuchanekileyo kwaye ngokuzimeleyo, kunye neengubo zeemicrometers ezimbalwa kunye nokubunjwa okungaguqukiyo kungenziwa ngokuqhubekayo amandla ebhobho.
Ixesha lokuposa: Mar-07-2024