Marka la barbardhigo dahaarka uumi-baxa iyo dahaarka buufinta, sifada ugu muhiimsan ee dahaarka ion-ka ayaa ah in ion-yada firfircoon ay duqeeyaan substrate-ka iyo lakabka filimka inta ay dhacayaan dhigista. Duqeynta ion-yada la dallacay waxay soo saartaa saameyn taxane ah, inta badan sida soo socota.
① Xoogga isku xidhka xuub / saldhigga (ku dhegga) oo xooggan, lakabka filimku ma fududa in la dhaco sababtoo ah duqeynta ion ee substrate-ka oo ay keento saameynta sputtering-ka, si substrate-ku u nadiifo, u shaqeeyo oo u kululaado, ma aha oo kaliya in laga saaro nuugista gaaska dusha sare ee substrate-ka iyo lakabka wasakhaysan, laakiin sidoo kale in laga saaro dusha sare ee oksaydhyada substrate-ka. Duufaanta Ion ee kulaylka iyo cilladaha waxaa sababi kara saameynta faafinta ee la xoojiyay ee substrate-ka, labadaba si loo hagaajiyo sifooyinka kristalinta ee qaab-dhismeedka lakabka dusha sare ee substrate-ka, laakiin sidoo kale waxay bixisaa shuruudaha sameynta marxaladaha daawaha; iyo duqeynta ion-ka tamarta sare, laakiin sidoo kale waxay soo saartaa xaddi cayiman oo ah ion-ka lagu beero iyo saameynta isku darka ion-ka.
② Dahaarka Ion-ka ee sababa soo saarista shucaaca ka gudba oo wanaagsan marka ay dhacdo cadaadis sare (ka weyn ama la mid ah 1Pa) waa ion-yada uumiga ion-ka ama molecules-ka safarka ay ugu jiraan substrate-ka ka hor inta aysan molecules-ka gaaska la kulmin isku dhacyo dhowr ah, sidaa darteed walxaha filimka ayaa lagu kala firdhin karaa substrate-ka, taasoo hagaajinaysa daboolida lakabka filimka; walxaha filimka ion-ka ahna waxaa sidoo kale lagu shubi doonaa ficilka goobta korontada ee dusha sare ee substrate-ka oo leh danab taban. Meel kasta oo dusha sare ee substrate-ka ah oo leh danab taban, kaas oo aan lagu gaari karin dahaadhka uumiga.
– Maqaalkan waxaa soo saaray ’’Qoraalkan waxaa soo saaray ’’soo saaraha mashiinka dahaadhka faakuumkaGuangdong Zhenhua
Waqtiga boostada: Jan-12-2024