Ma e jiri ya tụnyere ịfụ mmiri na ịfụ mmiri, ihe kacha mkpa nke ịfụ ion bụ na ion ndị nwere ike na-awakpo ihe ndị dị n'okpuru ala na oyi akwa ihe nkiri ahụ mgbe a na-etinye ha. Mkpọda nke ion ndị a na-agbaze na-emepụta ọtụtụ mmetụta, ọkachasị dịka ndị a.
① Ike njikọ akpụkpọ ahụ / ntọala (njikọ) siri ike, oyi akwa ihe nkiri ahụ adịghị mfe ịda n'ihi bọmbụ ion nke substrate nke mmetụta sputtering mepụtara, nke mere na a na-ehicha substrate ahụ, na-arụ ọrụ ma na-ekpo ọkụ, ọ bụghị naanị iji wepụ adsorption nke gas n'elu substrate ahụ na oyi akwa ruru unyi, kamakwa iji wepụ elu nke substrate oxides. Enwere ike ibute bọmbụ ion nke kpo oku na ntụpọ site na mmetụta mgbasa nke substrate ahụ, ma iji melite njirimara kristal nke nhazi oyi akwa elu substrate ahụ, kamakwa ọ na-enye ọnọdụ maka nhazi nke usoro alloy; na bọmbụ ion ike dị elu, kamakwa ọ na-emepụta ụfọdụ ọnụọgụ nke ntinye ion na mmetụta ngwakọta ion.
② Mkpuchi ion nke na-emepụta ezigbo radieshon gafere n'ihe gbasara nrụgide dị elu (karịa ma ọ bụ hà nhata 1Pa) bụ ion vapor ma ọ bụ molekul ionized na njem ya na substrate tupu molekul gas ahụ enwee ọtụtụ ihe mgbawa, yabụ enwere ike ịgbasa ihe nkiri ahụ gburugburu substrate ahụ, si otú a na-eme ka mkpuchi nke oyi akwa ihe nkiri ahụ ka mma; a ga-etinyekwa ihe nkiri ionized n'okpuru ọrụ nke ubi eletrik n'elu substrate ahụ nwere voltaji na-adịghị mma Ọnọdụ ọ bụla n'elu substrate ahụ nwere voltaji na-adịghị mma, nke enweghị ike ime site na mkpuchi evaporation.
–E bipụtara akụkọ a site n'aka onyeigwe mkpuchi igwe emeputa ihe mkpuchiGuangdong Zhenhua
Oge ozi: Jenụwarị-12-2024

