Poyerekeza ndi evaporation plating ndi sputtering plating, chinthu chofunikira kwambiri pa ion plating ndichakuti ma ion amphamvu amaphulitsa substrate ndi filimu wosanjikiza pamene akuikidwa. Kuphulitsa ma ion omwe ali ndi mphamvu kumabweretsa zotsatira zingapo, makamaka motere.
① Mphamvu yolumikizira ya nembanemba / maziko (kumatira) ndi yamphamvu, wosanjikiza wa filimuyo siwophweka kugwa chifukwa cha kuphulika kwa ma ion a substrate komwe kumapangidwa ndi mphamvu yotulutsa madzi, kotero kuti substrateyo iyeretsedwe, kuyatsidwa ndikutenthedwa, osati kungochotsa kulowetsedwa kwa mpweya pamwamba pa substrate ndi wosanjikiza woipitsidwa, komanso kuchotsa pamwamba pa ma oxide a substrate. Kuphulika kwa ma ion a kutentha ndi zolakwika kumatha kuchitika chifukwa cha kufalikira kwamphamvu kwa substrate, zonse kuti ziwongolere mawonekedwe a kristalo a gulu la wosanjikiza wa substrate, komanso zimapereka mikhalidwe yopangira magawo a alloy; komanso kuphulika kwa ma ion amphamvu kwambiri, komanso kumapanga kuchuluka kwa ion implantation ndi ion beam mixing effect.
② Chophimba cha ma ion chomwe chimapangitsa kuti pakhale kuwala kwabwino kodutsa ngati pali kupanikizika kwakukulu (koposa kapena kofanana ndi 1Pa) ndi ma ion a nthunzi kapena mamolekyu omwe ali mumlengalenga kupita ku substrate mamolekyu a gasi asanakumane ndi kugundana kangapo, kotero tinthu ta filimuyi tikhoza kufalikira mozungulira substrate, motero kuphimba kwa filimuyo kudzakhala bwino; ndipo tinthu ta filimuyi tidzakhalanso pansi pa mphamvu ya magetsi pamwamba pa substrate yokhala ndi voltage yoyipa. Malo aliwonse pamwamba pa substrate yokhala ndi voltage yoyipa, yomwe singatheke ndi evaporation plating.
– Nkhaniyi yatulutsidwa ndiwopanga makina ophikira vacuumGuangdong Zhenhua
Nthawi yotumizira: Januwale-12-2024