① Ion danda rinobatsira deposition tekinoroji inoratidzwa nekunamatira kwakasimba pakati pefirimu uye substrate, iyo firimu layer yakasimba kwazvo. Ongororo dzakaratidza kuti: ion beam yakabatsira kuiswa kwekunamira pane kunamatira kwehutsi hwehutsi hwakawedzera kanoverengeka kusvika kumazana enguva, chikonzero chinonyanya kukonzerwa neiyoni bombardment pamusoro peiyo yekuchenesa maitiro, kuitira kuti membrane base interface iite gradient interfacial chimiro, kana hybrid transition layer, pamwe nekuderedza kushushikana kwe membrane.
② Ion danda rinobatsira dhizaini rinogona kuvandudza ma mechaniki emufirimu, kuwedzera hupenyu hwekuneta, yakakodzera kwazvo kugadzirira maokisi, carbides, cubic BN, TiB: uye madhaimondi-akajaidzwa. Semuenzaniso, mu1Crl8Ni9Ti simbi inodzivirira kupisa pakushandiswa kweion danda-yakabatsira deposition tekinoroji kukura 200nm SiN, yakaonda firimu, kwete chete inogona kutadzisa kubuda kwekuneta kutsemuka pamusoro pechinhu, asi zvakare inogona kuderedza zvakanyanya kuneta mutswe diffusion rate, kuwedzera hupenyu hwayo ine basa rakanaka.
③ Ion danda rinobatsira dhizaini rinogona kushandura kushushikana kwechimiro chefirimu uye chimiro chayo chekristaro chinoshanduka. Semuenzaniso, kugadzirira kweCr firimu ine 11.5keV Xe + kana Ar + bombardment ye substrate pamusoro, yakaona kuti kugadziridzwa kweiyo substrate tembiricha, bombardment ion simba, ion uye atomu yekusvika ratio uye mamwe ma paramita, anogona kuita kushushikana kubva kune tensile kuenda ku compression kushushikana, chimiro chekristaro chemufirimu chichaburitsawo shanduko. Pasi peimwe reshiyo yeioni kumaatomu, danda reiyoni rinobatsira kuiswa rine sarudzo iri nani yakatarisa pane membrane layer inoiswa ne thermal vapor deposition.
④ Ion danda rinobatsira dhizaini rinogona kukwidziridza kusimba kwekuora uye oxidation kuramba kwe membrane. Sezvo iyo ion beam yakabatsira kuiswa kwe membrane layer iri dense, iyo membrane base interface chimiro kuvandudzwa kana kuumbwa kweamorphous mamiriro anokonzerwa nekutsakatika kwemuganho wezviyo pakati pezvimedu, izvo zvinokonzeresa kukwidziridzwa kwekupokana kwekuora uye oxidation kuramba kwezvinhu.
Wedzera kushora kwekushomeka kwezvinhu uye kuramba iyo oxidizing mhedzisiro yekupisa kwepamusoro.
(5) Ion danda rinobatsira dhizaini rinogona kushandura magineti emagetsi emufirimu uye kugadzirisa mashandiro emafirimu matete. (6) Ion-inobatsirwa deposition inobvumira kukura kwemafirimu akaonda akasiyana pakudziya kwakadzikira uye inodzivirira mhedzisiro yezvinhu kana mativi chaiwo angazokonzerwa nekurapwa pakupisa kwakanyanya, sezvo maparamendi ane chekuita neatomic deposition uye ion implantation inogona kugadziridzwa nemazvo uye yakazvimiririra, uye machira emamicrometer mashoma ane kuenderana kuumbwa pamhepo yakaderera inogona kugadzirwa.
Nguva yekutumira: Mar-07-2024