Vacuum Ion

Vacuum ion coating (bita ion plate) ni Reta zunzubumwe zamerika mu 1963 isosiyete yo muri Somdiya DM Mattox yabisabye, mu myaka ya za 70 niterambere ryihuse ryubuhanga bushya bwo kuvura hejuru. Ryerekeza ku gukoresha inkomoko yo guhumeka cyangwa intego yo gusunika mu kirere cya vacuum kugirango ibintu bya firime bihindurwe cyangwa bisohoka, bihumeka cyangwa bisohoka mu gice cyibice bigize umwanya wo gusohora gaze ioni mubyuma bya ion.

Ibi bice bishyirwa kuri substrate munsi yumurima wamashanyarazi kugirango ubyare inzira yoroheje.

Vacuum ion isahani yubwoko bwinshi, mubisanzwe ukurikije ibikoresho bya membrane kugirango itange isoko ya ion izagabanywamo ubwoko bubiri: inkomoko yumwuka wubwoko bwa ion plaque hamwe nubwoko bwintego ya ion. Iyambere ihumeka no gushyushya ibikoresho bya firime kugirango ikore imyuka yicyuma, kuburyo iba iyonone igice cyumuyaga wibyuma hamwe na atome zidafite ingufu zitagira aho zibogamiye mumwanya wa plasma isohora gaze, binyuze mumurimo wumuriro wamashanyarazi kugirango ugere kuri substrate kubyara firime zoroshye; icya nyuma ni ugukoresha ion zifite ingufu nyinshi (urugero, Ar +) hejuru y’ibisasu bya firime kugirango ibisasu biva mu bice binyujijwe mu mwanya w’ibisohoka gaze byinjira muri ion cyangwa atome zitagira aho zibogamiye, kugira ngo bigere hejuru y’ubutaka kandi bibyare firime.

–Iyi ngingo yasohowe naimashini ikora imashiniGuangdong Zhenhua