Ugereranije no guhumeka ibyuka hamwe no gusasa, ikintu cyingenzi kiranga ion ni uko ion zifite ingufu zitera substrate hamwe na firime mugihe cyo kubitsa bibaye. Igisasu cya ion zishyirwaho gitanga urukurikirane rwingaruka, cyane cyane nkibi bikurikira.
① Membrane / base bonding force (adhesion) ikomeye, urwego rwa firime ntirworoshye kugwa bitewe na ion bombardment ya substrate yatewe ningaruka ziterwa na sputtering, kuburyo substrate isukurwa, igakora kandi igashyuha, ntabwo ari ugukuraho gusa adsorption ya gaze hejuru yubutaka bwa substrate hamwe nubutaka bwanduye. Ion ibisasu byo gushyushya nubusembwa birashobora guterwa ningaruka zogukwirakwiza zo gukwirakwiza substrate, byombi kugirango tunonosore imiterere ya kristaline yumuryango wubutaka bwa substrate, ariko kandi itanga ibisabwa kugirango habeho ibyiciro bivanze; nimbaraga nyinshi ion bombardment, ariko kandi itanga urugero runaka rwo gutera ion hamwe ningaruka zo kuvanga ion.
Ating Ion itwikiriye kugirango itange imirasire myiza yo kurengana mugihe cyumuvuduko mwinshi (urenze cyangwa uhwanye na 1Pa) ni ion ion vapor ion cyangwa molekile mu rugendo rwayo muri substrate mbere yuko molekile ya gaze ihura ninshi, bityo ibice bya firime birashobora gukwirakwira hafi ya substrate, bityo bikazamura ubwuzuzanye bwa firime; na firime ya ionisiyoneri nayo izashyirwa mubikorwa byumurima wamashanyarazi hejuru ya substrate hamwe na voltage mbi Umwanya uwo ariwo wose uri hejuru yubutaka hamwe na voltage mbi, idashobora kugerwaho no guhumeka.
–Iyi ngingo yasohowe naimashini ikora imashiniGuangdong Zhenhua
Igihe cyo kohereza: Mutarama-12-2024