Ikoranabuhanga rya Ion Beam

Technology Ion beam ifashwa na tekinoroji yo kubitsa irangwa no gukomera gukomeye hagati ya firime na substrate, urwego rwa firime rurakomeye cyane. Ubushakashatsi bwerekanye ko: ion beam yafashaga gushira hamwe kuruta gufatira imyuka yumuriro wiyongereye inshuro nyinshi kugeza ku magana, impamvu iterwa ahanini n’igisasu cya ion hejuru y’ingaruka z’isuku, ku buryo intera fatizo ya membrane ikora urwego rudasanzwe, cyangwa urwego rw’inzibacyuho, ndetse no kugabanya imihangayiko ya membrane.

② Ion beam ifashwa kubitsa irashobora kunoza imiterere ya firime, ikongerera ubuzima umunaniro, ibereye cyane mugutegura okiside, karbide, cubic BN, TiB: hamwe na diyama. Kurugero, muri 1Crl8Ni9Ti ibyuma birwanya ubushyuhe mukoresha ikoreshwa rya tekinoroji ya ion beam ifashwa nogukoresha kugirango ikure 200nm SiN, firime yoroheje, ntishobora gusa kubuza kuvuka kwimitsi yumunaniro hejuru yibikoresho, ariko kandi irashobora kugabanya cyane igipimo cyo gukwirakwiza umunaniro, kugirango ubuzima bwayo bugire uruhare runini.

On Ion beam ifashwa kubitsa irashobora guhindura imiterere ya firime hamwe nuburyo bwa kristaline ihinduka. Kurugero, gutegura firime ya Cr hamwe na 11.5keV Xe + cyangwa Ar + ibisasu hejuru yubutaka bwa substrate, yasanze ko ihindurwa ryubushyuhe bwa substrate, ingufu za ion bombardment, ion hamwe na atom igeze hamwe nibindi bipimo, bishobora gutuma imihangayiko iva mubibazo bikabije, imiterere ya kristu ya firime nayo izatanga impinduka. Munsi yikigereranyo cya ion na atome, ion beam ifashwa kubitsa ifite icyerekezo cyiza cyo guhitamo kuruta icyerekezo cya membrane cyashyizwemo nubushyuhe bwumuriro.

④ Ion beam ifashwa kubitsa irashobora kongera imbaraga zo kurwanya ruswa no kurwanya okiside ya membrane. Nkuko ion beam ifasha gushira mubice bya membrane ni byinshi, imiterere yimbere yimbere ya membrane cyangwa imiterere ya amorphous iterwa no kubura imbibi zintete hagati yutwo duce, ibyo bikaba bifasha kongera imbaraga zo kurwanya ruswa no kurwanya okiside yibikoresho.

Kongera imbaraga zo kwangirika kwibintu no kurwanya okiside yubushyuhe bwo hejuru.

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