Vacuum ion zokutira (zomwe zimatchedwa ion plating) ndi United States mu 1963 kampani ya Somdia DM Mattox ikufuna, zaka za m'ma 1970 zakhala chitukuko chofulumira chaukadaulo watsopano wamankhwala. Amatanthawuza kugwiritsa ntchito gwero la evaporation kapena chandamale cha sputtering m'malo opanda mpweya kuti filimuyo ikhale evaporation kapena sputtering, evaporation kapena sputtering kuchokera ku gawo la tinthu tating'onoting'ono totulutsa mpweya wopangidwa ndi ayoni muzitsulo.
Izi particles waikamo pa gawo lapansi pansi zochita za magetsi kumunda kupanga woonda filimu ndondomeko.
Vacuum ion plating amitundu yambiri, nthawi zambiri malinga ndi nembanemba kuti apange gwero la ayoni amagawidwa m'mitundu iwiri: gwero la evaporation mtundu wa ion plating ndi sputtering chandamale chamtundu wa ion plating. Yoyamba ndi chamunthuyo ndi Kutenthetsa filimu zinthu kubala zitsulo nthunzi, kotero kuti pang'ono ionized mu nthunzi zitsulo ndi mkulu-mphamvu ndale maatomu mu danga la mpweya kumaliseche plasma, mwa udindo wa munda magetsi kufika gawo lapansi kupanga mafilimu woonda; chotsirizira ndi ntchito ayoni mkulu-mphamvu (mwachitsanzo, Ar +) padziko filimu chuma bombardment kuti sputtering kuchokera particles kudzera danga la mpweya kumaliseche ionized mu ayoni kapena mkulu-mphamvu ndale maatomu, kufika pamwamba pa gawo lapansi ndi kupanga filimuyo.
-Nkhaniyi yatulutsidwa ndiwopanga makina opangira vacuumGuangdong Zhenhua
Nthawi yotumiza: Mar-07-2024