Mkpuchi ion mkpuchi (nke a na-akpọ ion plating) bụ United States na 1963 ụlọ ọrụ Somdia DM Mattox tụrụ aro, 1970s bụ mmepe ngwa ngwa nke teknụzụ ọgwụgwọ elu ọhụrụ. Ọ na-ezo aka na ojiji nke evaporation isi iyi ma ọ bụ sputtering lekwasịrị na a agụụ ikuku nke mere na film ihe evaporation ma ọ bụ sputtering, evaporation ma ọ bụ sputtering nke a akụkụ nke irighiri na gas ihapu ohere ionized n'ime metal ion.
A na-edobe ihe ndị a na mkpụrụ n'okpuru ọrụ nke ọkụ eletrik iji mepụta usoro ihe nkiri dị mkpa.
Vacuum ion plating nke ọtụtụ ụdị, na-emekarị dị ka akpụkpọ ahụ ihe na-emepụta ion isi iyi ga-ekewa ụzọ abụọ: evaporation isi iyi ụdị ion plating na sputtering lekwasịrị ụdị ion plating. A na-ekpochapụ nke mbụ site na ikpo ọkụ ihe nkiri ahụ iji mepụta vapors ígwè, nke mere na ọ na-eme ka ọ bụrụ akụkụ nke ionized n'ime vapors metal na atoms na-anọpụ iche nke ike dị elu na oghere nke ikuku gas na-ekpochapụ plasma, site na ọrụ nke ọkụ eletrik iji ruo mkpụrụ osisi iji mepụta ihe nkiri dị mkpa; Nke ikpeazụ bụ ojiji nke elu-ike ion (eg, Ar +) n'elu ihe nkiri bombu ihe na-eme ka sputtering nke ahụ site na ohere nke gas ihapu ionized n'ime ion ma ọ bụ elu-ike na-anọpụ iche atọm, iru elu nke mkpụrụ na n'ịwa ihe nkiri.
–E wepụtara akụkọ aonye na-emepụta igwe mkpuchi ikukuGuangdong Zhenhua
Oge nzipu: Mar-07-2024