① Ion beam assisted deposition technology yog qhov muaj zog adhesion ntawm zaj duab xis thiab substrate, zaj duab xis txheej muaj zog heev. Cov kev sim tau pom tias: ion beam pab deposition ntawm adhesion tshaj qhov adhesion ntawm thermal vapor deposition nce ntau zaus mus rau ntau pua lub sij hawm, yog vim li cas yog vim li cas yog vim li cas rau lub ion bombardment nyob rau saum npoo ntawm cov nyhuv ntxuav, thiaj li hais tias lub membrane puag interface tsim ib tug gradient interfacial qauv, los yog hybrid hloov txheej txheej, raws li zoo raws li kom txo tau qhov kev nyuaj siab ntawm lub membrane.
② Ion beam pab deposition tuaj yeem txhim kho cov khoom siv ntawm cov yeeb yaj kiab, txuas ntxiv lub neej qaug zog, tsim nyog rau kev npaj cov oxides, carbides, cubic BN, TiB: thiab pob zeb diamond zoo li txheej. Piv txwv li, nyob rau hauv 1Crl8Ni9Ti tshav kub-resistant steel ntawm kev siv ion beam-pab deposition technology kom loj hlob 200nm SiN, nyias zaj duab xis, tsis tsuas yog yuav inhibit qhov tshwm sim ntawm qaug zog tawg ntawm cov khoom, tab sis kuj yuav txo tau qhov qaug zog tawg diffusion npaum li cas, mus cuag nws lub neej muaj lub luag hauj lwm zoo.
③ Ion beam pab deposition tuaj yeem hloov qhov kev ntxhov siab ntawm zaj duab xis thiab nws cov qauv crystalline hloov. Piv txwv li, kev npaj ntawm Cr zaj duab xis nrog 11.5keV Xe + los yog Ar + bombardment ntawm lub substrate nto, pom tau hais tias qhov kev hloov ntawm lub substrate kub, bombardment ion zog, ion thiab atom tuaj txog piv thiab lwm yam tsis, yuav ua rau cov kev ntxhov siab los ntawm tensile mus rau compressive kev nyuaj siab, lub crystal qauv ntawm cov zaj duab xis kuj yuav tsim kev hloov. Nyob rau hauv ib qho piv txwv ntawm ions rau atoms, ion beam pab deposition muaj kev xaiv zoo dua li cov txheej membrane tso los ntawm thermal vapor deposition.
④ Ion beam pab deposition tuaj yeem txhim kho corrosion kuj thiab oxidation tsis kam ntawm daim nyias nyias. Raws li cov ion beam pab deposition ntawm daim nyias nyias txheej yog ntom, lub membrane puag interface qauv txhim kho los yog tsim ntawm amorphous lub xeev tshwm sim los ntawm qhov ploj ntawm grain ciam teb ntawm cov hais, uas yog conducive rau txhim kho corrosion kuj thiab oxidation tsis kam ntawm cov khoom.
Txhim khu cov corrosion kuj ntawm cov khoom thiab tiv thaiv oxidizing nyhuv ntawm kub kub.
(5) Ion beam assisted deposition tuaj yeem hloov cov khoom siv hluav taws xob ntawm cov yeeb yaj kiab thiab txhim kho kev ua haujlwm ntawm cov yeeb yaj kiab nyias. (6) Ion-pab deposition tso cai rau kev loj hlob ntawm ntau yam nyias zaj duab xis ntawm qhov kub thiab txias thiab zam qhov tsis zoo ntawm cov ntaub ntawv lossis cov khoom siv precision uas yuav tshwm sim los ntawm kev kho mob ntawm qhov kub thiab txias, vim tias cov tsis muaj feem cuam tshuam rau atomic deposition thiab ion implantation tuaj yeem hloov kho kom raug thiab ntawm nws tus kheej, thiab cov txheej txheem ntawm ob peb micrometers nrog cov khoom sib xws tuaj yeem tsim tawm tsis tu ncua ntawm lowland bombardment.
Post lub sij hawm: Mar-07-2024