Vacuum ion shafi (wanda ake magana da shi azaman ion plating) shine Amurka a cikin 1963 kamfanin Somdia DM Mattox ya ba da shawara, shekarun 1970s shine haɓakar haɓakar sabuwar fasahar jiyya ta sama. Yana nufin amfani da tushen evaporation ko sputtering manufa a cikin yanayi mara kyau ta yadda fim ɗin ya fito ko sputtering, evaporation ko sputtering daga wani ɓangare na barbashi a cikin iskar gas sarari ionized zuwa karfe ions.
Wadannan barbashi ana ajiye su a kan substrate karkashin aikin filin lantarki don samar da tsarin fim na bakin ciki.
Vacuum ion plating iri-iri, yawanci bisa ga kayan membrane don samar da tushen ion za a kasu kashi biyu: nau'in nau'in ion plating na evaporation da sputtering nau'in ion plating. Na farko yana fitar da shi ta hanyar dumama kayan fim don samar da tururi na ƙarfe, ta yadda za a sanya shi a cikin wani yanki zuwa ion zuwa tururi na ƙarfe da kuma atom masu ƙarfi masu ƙarfi a cikin sararin plasma na fitar da iskar gas, ta hanyar aikin wutar lantarki don isa ga substrate don samar da fina-finai na bakin ciki; na karshen shi ne yin amfani da high-makamashi ions (misali, Ar +) a saman na fim abu bombardment don yin sputtering daga cikin barbashi ta wurin sarari na iskar gas ionized cikin ions ko high-makamashi tsaka tsaki atom, isa surface na substrate da kuma samar da fim.
–An fitar da wannan labarininjin shafa injin injinGuangdong Zhenhua
Lokacin aikawa: Maris-07-2024