Ubuchwepheshe bokufaka umphunga we-plasma chemical arc enhanced plasma chemical busebenzisa isibhamu se-hot wire arc ukukhipha i-plasma ye-arc, efushaniswe njengobuchwepheshe be-hot wire arc PECVD. Lobu buchwepheshe bufana nobuchwepheshe bokumboza i-ion yesibhamu se-hot wire arc, kodwa umehluko ukuthi ifilimu eqinile etholwe nge-hot wire arc gun ion isebenzisa ukugeleza kwe-electron ye-arc light ekhishwa yisibhamu se-hot wire arc ukuze kushiswe futhi kushabalale insimbi esitsheni esivuthayo, kuyilapho i-hot wire arc light PECVD iphakelwa amagesi okusabela, njenge-CH4 ne-H2, asetshenziselwa ukufaka amafilimu edayimane. Ngokuncika ku-high-density arc discharge current ekhishwa yisibhamu se-hot wire arc, ama-reactive gas ion ajabule ukuthola izinhlayiya ezisebenzayo ezahlukahlukene, kufaka phakathi ama-gas ion, ama-athomu ion, amaqembu asebenzayo, njalo njalo.
Kudivayisi ye-PECVD ye-arc wire eshisayo, kusafakwe ama-coil amabili kagesi ngaphandle kwegumbi lokumboza, okwenza ukugeleza kwe-electron okunobuningi obukhulu kujikeleze ngesikhathi sokuhamba kuya ku-anode, okwandisa amathuba okushayisana kanye ne-ionization phakathi kokugeleza kwe-electron kanye negesi yokusabela. I-coil ye-electromagnetic ingahlangana futhi ibe ikholomu ye-arc ukwandisa ukuminyana kwe-plasma kwegumbi lonke lokufaka. Ku-arc plasma, ukuminyana kwalezi zinhlayiya ezisebenzayo kuphezulu, okwenza kube lula ukufaka amafilimu edayimane nezinye izingqimba zefilimu endaweni yokusebenza.
——Lesi sihloko sikhishwe yiGuangdong Zhenhua Technology,umenzi wemishini yokumboza ebonakalayo.
Isikhathi sokuthunyelwe: Meyi-05-2023