Ikoranabuhanga ryo gushyira umwuka mu maraso rikoresha imbunda ishyushye ya arc plasma kugira ngo ikuremo plasma ya arc, mu magambo ahinnye nka ikoranabuhanga rya PECVD rishyushye. Iri koranabuhanga risa n'ikoranabuhanga ryo gusiga imbunda ishyushye ya arc gun, ariko itandukaniro ni uko firime ikomeye iboneka hakoreshejwe imbunda ishyushye ya arc gun ikoresha electron y'urumuri isohoka n'imbunda ishyushye ya arc kugira ngo ishyushye kandi ihindure icyuma mu cyuma gishyushye, mu gihe imbunda ishyushye ya arc PECVD ihabwa imyuka ikora, nka CH4 na H2, ikoreshwa mu gushyiramo filime za diyama. Bitewe n'umuyoboro mwinshi w'amashanyarazi usohoka n'imbunda ishyushye ya arc, imbunda zikora zishishikajwe no kubona uduce dutandukanye dukora, harimo imbunda zikora, imbunda za atome, amatsinda akora, n'ibindi.
Mu gikoresho cya PECVD cy’insinga ishyushye, hari imiyoboro ibiri ya electromagnetic iracyashyizwe hanze y’icyumba cyo gusigamo, bigatuma electron ifite ubucucike bwinshi izenguruka mu gihe cyo kwerekeza kuri anode, byongera amahirwe yo guhurirana no kwihuza kwa ion hagati y’urujya n’uruza rwa electron na gaze ya reaction. Umuyoboro wa electromagnetic ushobora kandi guhuriza hamwe mu nkingi ya arc kugira ngo wongere ubucucike bwa plasma bw’icyumba cyose cyo kubikamo. Muri plasma ya arc, ubucucike bw’utwo duce dukora buba buri hejuru, bigatuma byoroha gushyira filime za diyama n’izindi mpande za filime ku gikoresho cyo gukoraho.
——Iyi nkuru yasohotse na Guangdong Zhenhua Technology,uruganda rukora imashini zisiga irangi ry'urumuri.
Igihe cyo kohereza: Gicurasi-05-2023