Umuyoboro ushyushye arc wongereye plasma ya chimique ya vapor de tekinoroji ikoresha imbunda ishyushye ya arc imbunda yohereza arc plasma, mu magambo ahinnye nkicyuma gishyushye arc tekinoroji ya PECVD.Iri koranabuhanga risa na tekinoroji ishyushye ya arc imbunda ya ion yo gutwikira, ariko itandukaniro nuko firime ikomeye yabonywe na wire wire arc imbunda ya ion coating ikoresha arc itara rya electron electronique yasohowe nimbunda ishyushye ya arc kugirango ishyuhe kandi ihumeke ibyuma muri ingirakamaro, mugihe insinga zishyushye arc urumuri PECVD igaburirwa imyuka ya reaction, nka CH4 na H2, zikoreshwa mukubika firime ya diyama.Mu kwishingikiriza kumuyoboro mwinshi wa arc usohoka utangwa nimbunda ishyushye ya arc imbunda, ion ya gaze ya reaction ishimishwa no kubona ibice bitandukanye bikora, harimo ion ya gaze, ion atomike, amatsinda akora, nibindi.
Mu cyuma gishyushye arc igikoresho cya PECVD, ibyuma bibiri bya electromagnetique biracyashyirwa hanze yicyumba cyo gutwikamo, bigatuma amashanyarazi ya elegitoronike menshi azunguruka mugihe cyo kwerekeza kuri anode, bikongerera amahirwe yo kugongana no ionisiyoneri hagati ya electron na gaze ya reaction .Igikoresho cya electromagnetic kirashobora kandi guhurira mumurongo wa arc kugirango wongere plasma yubucucike bwicyumba cyose cyabitswe.Muri arc plasma, ubwinshi bwibi bice bikora ni byinshi, byoroshye kubitsa firime ya diyama nibindi bice bya firime kumurimo.
——Iyi ngingo yasohowe na tekinoroji ya Guangdong Zhenhua, auruganda rukora imashini nziza.
Igihe cyo kohereza: Gicurasi-05-2023