Cov tshuab siv cov hlau kub arc enhanced plasma chemical vapor deposition siv cov phom kub arc gun los tso tawm arc plasma, uas luv ua cov tshuab hot wire arc PECVD. Cov tshuab no zoo ib yam li cov tshuab hot wire arc gun ion coating, tab sis qhov txawv yog tias cov zaj duab xis khov kho tau los ntawm cov hlau kub arc gun ion coating siv cov hluav taws xob arc light uas cov hlau kub arc gun tso tawm los ua kom sov thiab ua kom cov hlau hauv lub crucible sov, thaum cov hlau kub arc light PECVD pub nrog cov pa roj reaction, xws li CH4 thiab H2, uas siv rau kev tso cov yeeb yaj kiab diamond. Los ntawm kev cia siab rau cov hluav taws xob high-density arc discharge tam sim no uas cov hlau kub arc gun tso tawm, cov roj reactive ions zoo siab kom tau txais ntau yam khoom siv, suav nrog cov roj ions, atomic ions, cov pab pawg nquag, thiab lwm yam.
Hauv lub tshuab hluav taws xob kub arc PECVD, ob lub electromagnetic coils tseem raug ntsia sab nraum chav txheej, ua rau cov electron ntws ceev ceev tig thaum lub sijhawm txav mus rau anode, ua rau muaj feem cuam tshuam thiab ionization ntawm cov electron ntws thiab cov roj tshuaj tiv thaiv. Lub electromagnetic coil kuj tseem tuaj yeem sib sau ua ke rau hauv ib lub arc kem kom nce qhov ceev ntawm plasma ntawm tag nrho lub chamber deposition. Hauv arc plasma, qhov ceev ntawm cov khoom me me no siab, ua rau nws yooj yim dua los tso cov yeeb yaj kiab pob zeb diamond thiab lwm cov txheej zaj duab xis rau ntawm qhov workpiece.
—— Tsab xov xwm no tau tshaj tawm los ntawm Guangdong Zhenhua Technology, ib qhoChaw tsim khoom ntawm cov tshuab txheej kho qhov muag.
Lub sijhawm tshaj tawm: Tsib Hlis-05-2023