Cov hlau kub arc txhim kho cov ntshav plasma tshuaj vapor deposition tshuab siv cov kub hlau arc phom kom emit arc plasma, abbreviated li kub hlau arc PECVD tshuab.Cov tshuab no zoo ib yam li cov hlau kub arc phom ion txheej tshuab, tab sis qhov sib txawv yog tias cov yeeb yaj kiab tau los ntawm cov hlau kub arc phom ion txheej siv cov arc lub teeb hluav taws xob ntws tawm los ntawm cov hlau kub arc phom kom sov thiab evaporate cov hlau hauv. lub crucible, thaum lub kub hlau arc teeb PECVD yog pub nrog cov tshuaj tiv thaiv gases, xws li CH4 thiab H2, uas yog siv rau depositing pob zeb diamond films.Los ntawm kev cia siab rau qhov siab-density arc tawm tam sim no tawm los ntawm cov phom kub hlau arc, cov pa roj ions zoo siab kom tau txais ntau yam khoom siv, suav nrog cov roj ions, atomic ions, active pawg, thiab lwm yam.
Nyob rau hauv lub kub hlau arc PECVD ntaus ntawv, ob lub electromagnetic coils tseem ntsia sab nraum lub txheej txheej, ua rau lub high-density electron ntws mus tig thaum lub sij hawm txav mus rau lub anode, ua rau muaj kev sib tsoo thiab ionization ntawm electron txaus thiab cov tshuaj tiv thaiv roj. .Cov electromagnetic coil kuj tseem tuaj yeem hloov mus rau hauv arc kem txhawm rau ua kom cov ntshav plasma ntom ntom ntawm tag nrho cov khoom tso tawm chamber.Nyob rau hauv arc plasma, qhov ceev ntawm cov active hais yog siab, ua rau nws yooj yim dua rau deposit pob zeb diamond films thiab lwm yam films txheej ntawm lub workpiece.
—— Kab lus no tau tshaj tawm los ntawm Guangdong Zhenhua Technology, amanufacturers ntawm optical txheej tshuab.
Post lub sij hawm: May-05-2023