Tekinoroji yekupisa wire arc yakawedzerwa plasma chemical vapor deposition inoshandisa hot wire arc gun kuburitsa arc plasma, yakapfupikiswa se hot wire arc PECVD technology. Iyi tekinoroji yakafanana ne hot wire arc gun ion coating technology, asi musiyano ndewekuti firimu rakasimba rinowanikwa ne hot wire arc gun ion coating rinoshandisa arc light electron flow inoburitswa ne hot wire arc gun kupisa nekupwanya simbi iri mu crucible, nepo hot wire arc light PECVD ichipihwa ma reaction gases, akadai se CH4 ne H2, ayo anoshandiswa kuisa madhaimani mafirimu. Nekushandisa high-density arc discharge current inoburitswa ne hot wire arc gun, reactive gas ions inofara kuwana active particles dzakasiyana-siyana, kusanganisira gas ions, atomic ions, active groups, nezvimwewo.
Muchishandiso chePECVD chewaya inopisa, macoil maviri emagetsi achiri kuiswa kunze kwekamuri rekufukidza, zvichiita kuti kuyerera kwemaerekitironi akawanda kutenderere panguva yekufamba kuenda kuanode, zvichiwedzera mukana wekusangana uye ionization pakati pekuyerera kwemaerekitironi negasi re reaction. Electromagnetic coil inogonawo kusangana kuita arc column kuti iwedzere plasma density yekamuri rese rekuisa. Mu arc plasma, density yezvikamu izvi zvinoshanda yakakwira, zvichiita kuti zvive nyore kuisa mafirimu emadhaimani nedzimwe firimu layers pabasa.
——Chinyorwa ichi chakaburitswa neGuangdong Zhenhua Technology, amugadziri wemichina yekuputira yemaziso.
Nguva yekutumira: Chivabvu-05-2023