Ko te hangarau whakatakoto matū plasma whakarei ake i te pewa waea wera e whakamahi ana i te pū pewa waea wera hei tuku i te plasma pewa, e whakarapopototia ana ko te hangarau pewa waea wera PECVD. He rite tēnei hangarau ki te hangarau paninga katote pū pewa waea wera, engari ko te rerekētanga ko te kiriata totoka i whiwhihia e te paninga katote pū pewa waea wera e whakamahi ana i te rere irahiko rama pewa e tukuna ana e te pū pewa waea wera hei whakamahana me te mimiti i te konganuku i roto i te para, ko te rama pewa waea wera PECVD e whāngaihia ana ki ngā hau tauhohenga, pērā i te CH4 me te H2, e whakamahia ana mō te whakatakoto kiriata taimana. Mā te whakawhirinaki ki te iahiko tuku pewa kiato teitei e tukuna ana e te pū pewa waea wera, ka whakaohokia ngā katote hau tauhohenga ki te whiwhi i ngā matūriki hohe, tae atu ki ngā katote hau, ngā katote ngota, ngā rōpū hohe, me ētahi atu.
I roto i te taputapu PECVD pewa waea wera, e rua ngā koiri hikohiko e tāuta tonu ana i waho o te rūma paninga, ka huri te rere o te irahiko kiato-teitei i te wā e neke ana ki te anode, ka piki ake te tūponotanga o te tukinga me te ionization i waenga i te rere o te irahiko me te hau tauhohenga. Ka taea hoki e te koiri hikohiko te whakakotahi ki roto i te pou pewa hei whakanui ake i te kiato plasma o te rūma whakatakotoranga katoa. I roto i te plasma pewa, he teitei te kiato o ēnei matūriki hohe, ka māmā ake te whakatakotoranga o ngā kiriata taimana me ētahi atu paparanga kiriata ki runga i te mea mahi.
——I tukuna tēnei tuhinga e Guangdong Zhenhua Technology, hekaihanga mīhini paninga whatu.
Wā tuku: Mei-05-2023