Ukadaulo wa waya wotentha wopititsa patsogolo ukadaulo wa plasma chemical vapor deposition umagwiritsa ntchito mfuti yotentha ya arc kutulutsa arc plasma, yofupikitsidwa ngati ukadaulo wotentha wa waya arc PECVD.Ukadaulo uwu ndi wofanana ndi ukadaulo wopaka waya wotentha wa arc gun ion coating, koma kusiyana kwake ndikuti filimu yolimba yomwe imapezedwa ndi waya wotentha wa arc gun ion coating imagwiritsa ntchito arc kuwala kwa ma elekitironi otuluka ndi mfuti yotentha ya arc kuti itenthetse ndikutulutsa chitsulo mkati. crucible, pomwe waya otentha arc kuwala PECVD amadyetsedwa ndi mipweya reaction, monga CH4 ndi H2, amene amagwiritsidwa ntchito poika mafilimu diamondi.Podalira kutulutsa kwamphamvu kwamphamvu kwa arc komwe kumatulutsidwa ndi mfuti yotentha ya waya, ma ion a gasi othamanga amasangalala kupeza tinthu tating'onoting'ono tating'ono, kuphatikiza ma ion a gasi, ayoni atomu, magulu ogwira ntchito, ndi zina zotero.
Mu chipangizo chotentha cha arc PECVD, ma coil awiri a electromagnetic amaikidwabe kunja kwa chipinda chophikira, zomwe zimapangitsa kuti ma elekitironi azitha kuyenda mozungulira panthawi yopita ku anode, ndikuwonjezera mwayi wa kugunda ndi ionization pakati pa kutuluka kwa electron ndi gasi. .Koyilo yamagetsi imathanso kusinthika kukhala gawo la arc kuti iwonjezere kuchuluka kwa plasma ya chipinda chonsecho.Mu arc plasma, kachulukidwe ka tinthu ting'onoting'ono tating'ono tating'onoting'ono, zomwe zimapangitsa kuti zikhale zosavuta kuyika mafilimu a diamondi ndi zigawo zina zamakanema pa workpiece.
——Nkhaniyi yatulutsidwa ndi Guangdong Zhenhua Technology, awopanga makina opaka utoto.
Nthawi yotumiza: May-05-2023