Ipilẹ oru kẹmika kẹmika ti irin (MOCVD), orisun ti ohun elo gaseous jẹ gaasi idapọmọra Organic irin, ati ilana ifakalẹ ipilẹ ti ifisilẹ jẹ iru si CVD.
1.MOCVD aise gaasi
Orisun gaseous ti a lo fun MOCVD jẹ gaasi irin-Organic (MOC). Awọn agbo ogun ara-irin jẹ awọn agbo ogun iduroṣinṣin ti a ṣe nipasẹ apapọ awọn nkan Organic pẹlu awọn irin. Awọn agbo ogun Organic ni alkyl, oorun didun. Alkyl pẹlu methyl, ethyl, propyl, ati butyl. Alkyl pẹlu methyl, ethyl, propyl, ati butyl. Oorun pẹlu awọn homologues phenyl, trimethyl gallium, [Ga(CH3)3], trimethyl aluminiomu [Al(CH3)3] fun ifisilẹ ti microelectronics, optoelectronics, semiconductors ninu awọn mẹta, marun agbo ni Layer fiimu, gẹgẹ bi awọn Ga (CH).3)3 ati amonia le wa ninu ohun alumọni wafer tabi oniyebiye lori idagba epitaxial ti awọn atupa LED ni Layer luminescent InGaN. Awọn atupa LED jẹ diẹ sii ju fifipamọ agbara itanna tungsten 90%, diẹ sii ju 60% fifipamọ awọn atupa Fuluorisenti. Awọn atupa LED jẹ 90% agbara diẹ sii daradara ju awọn atupa incandescent tungsten ati 60% agbara diẹ sii ju awọn atupa Fuluorisenti lọ. Ni ode oni, gbogbo iru awọn atupa ita, awọn atupa ina ati awọn atupa ọkọ ayọkẹlẹ ni ipilẹ lo awọn fiimu ti njade ina LED ti a ṣe nipasẹ MOCVD.
2. Idoju iwọn otutu
Iwọn otutu jijẹ ti awọn agbo ogun irin Organic ti lọ silẹ, ati iwọn otutu idalẹnu jẹ kekere ju ti HCVD lọ. Iwọn otutu ifisilẹ ti TiN ti a fi silẹ nipasẹ MOCVD le dinku si iwọn 500.
-Nkan yii ti tu silẹ nipasẹigbale ti a bo ẹrọ olupeseGuangdong Zhenhua
Akoko ifiweranṣẹ: Oṣu Kẹwa-20-2023