Ndobe anwụrụ ọkụ kemịkalụ metal organic (MOCVD), isi iyi nke ihe gas bụ gas organic compound metal, usoro mmeghachi omume bụ isi nke itinye ihe yiri CVD.
1.MOCVD gas raw
Isi iyi gas eji eme MOCVD bụ gas nke mejupụtara metal-organic (MOC). Ngwakọta metal-organic bụ ngwakọta kwụsiri ike nke a na-emepụta site na ijikọta ihe ndị dị ndụ na ọla. Ngwakọta organic nwere alkyl, aromatic. Alkyl gụnyere methyl, ethyl, propyl, na butyl. Alkyl gụnyere methyl, ethyl, propyl, na butyl. Ihe na-esi ísì ụtọ gụnyere phenyl homologues, trimethyl gallium, [Ga(CH)3)3], aluminom trimethyl [Al(CH3)3] maka itinye microelectronics, optoelectronics, semiconductors n'ime ihe atọ, ise dị na oyi akwa ihe nkiri ahụ, dịka Ga(CH3)3 ammonia nwere ike ịdị na wafer silicon ma ọ bụ sapphire na uto epitaxial nke oriọna LED na oyi akwa luminescent InGaN. Oriọna LED karịrị tungsten incandescent na-echekwa ike 90%, karịa 60% oriọna fluorescent na-echekwa ike. Oriọna LED na-arụ ọrụ nke ọma 90% karịa oriọna tungsten incandescent na 60% karịa oriọna fluorescent. Taa, ụdị oriọna okporo ámá niile, oriọna ọkụ na oriọna ụgbọala na-eji ihe nkiri LED na-ewepụta ọkụ nke MOCVD mepụtara.
2. Okpomọkụ mwepụ
Okpomọkụ nke ihe ndị mejupụtara ígwè organic dị ala, okpomọkụ nke ihe ndị e tinyere dị ala karịa nke HCVD. Enwere ike ibelata okpomọkụ nke TiN nke MOCVD tinyere ruo ihe dị ka ogo 500.
–E bipụtara akụkọ a site n'aka onyeigwe mkpuchi igwe emeputa ihe mkpuchiGuangdong Zhenhua
Oge ozi: Ọktoba-20-2023