ʻO ka Metal organic chemical vapor deposition (MOCVD), ʻo ke kumu o nā mea kinoea he kinoea hui metala organik, a ʻo ke kaʻina hana kumu o ka deposition ua like ia me CVD.
1.MOCVD kinoea maka
ʻO ke kumu kinoea i hoʻohana ʻia no MOCVD he kinoea hui metala-organic (MOC). ʻO nā hui metala-organic he mau hui paʻa i hana ʻia ma ka hoʻohui ʻana i nā mea organik me nā metala. Loaʻa i nā hui organik ka alkyl, aromatic. Loaʻa i ka Alkyl ka methyl, ethyl, propyl, a me ka butyl. Loaʻa i ka Alkyl ka methyl, ethyl, propyl, a me ka butyl. ʻO ka ʻala e komo pū ana me nā phenyl homologues, trimethyl gallium, [Ga(CH3)3], trimethyl alumini [Al(CH3)3] no ka waiho ʻana o ka microelectronics, optoelectronics, semiconductors i loko o nā hui ʻekolu, ʻelima i loko o ka papa kiʻiʻoniʻoni, e like me Ga(CH3)3 a hiki i ka ammonia ke lilo i loko o ka wafer silicon a i ʻole ka sapphire ma ka ulu ʻana o nā kukui LED epitaxial ma ka papa luminescent InGaN. ʻOi aku ka nui o nā kukui LED ma mua o nā kukui incandescent tungsten 90%, ʻoi aku ma mua o 60% nā kukui fluorescent mālama ikehu. ʻOi aku ka nui o ka ikehu o nā kukui LED ma mua o nā kukui incandescent tungsten a me 60% ʻoi aku ka nui o ka ikehu ma mua o nā kukui fluorescent. I kēia mau lā, hoʻohana nui nā ʻano kukui alanui āpau, nā kukui kukui a me nā kukui kaʻa i nā kiʻiʻoniʻoni LED i hana ʻia e MOCVD.
2. Ka mahana hoʻokahe
Haʻahaʻa ka mahana palaho o nā hui metala organik, a haʻahaʻa ka mahana waiho ʻana ma mua o ka HCVD. Hiki ke hoʻemi ʻia ka mahana waiho ʻana o TiN i waiho ʻia e MOCVD i kahi o 500 degere.
–Ua hoʻokuʻu ʻia kēia ʻatikala emea hana mīkini uhi hakahakaGuangdong Zhenhua
Ka manawa hoʻouna: ʻOkakopa-20-2023