Tacewar tururin sinadarai na ƙarfe (MOCVD), tushen iskar gas shine iskar gas mai hade da sinadarai na ƙarfe, kuma tsarin amsawar asali na tarawa yayi kama da CVD.
1. MOCVD mai amfani da iskar gas
Tushen iskar gas da ake amfani da shi don MOCVD shine iskar gas mai hade da ƙarfe (MOC). Haɗaɗɗun ƙarfe masu hade da ƙarfe sune mahaɗan da aka samar ta hanyar haɗa abubuwa masu hade da ƙarfe. Haɗaɗɗun halitta suna da alkyl, aromatic. Alkyl sun haɗa da methyl, ethyl, propyl, da butyl. Alkyl sun haɗa da methyl, ethyl, propyl, da butyl. Ƙamshi gami da phenyl homologues, trimethyl gallium, [Ga(CH)3)3], aluminum trimethyl [Al(CH3)3] don adana microelectronics, optoelectronics, semiconductors a cikin mahaɗan uku, biyar a cikin layin fim, kamar Ga(CH2)3)3 kuma ammonia na iya kasancewa a cikin wafer silicon ko sapphire akan haɓakar epitaxial na fitilun LED a cikin layin haske na InGaN. Fitilun LED sun fi tungsten incandescent masu adana makamashi 90%, fiye da 60% fitilun fluorescent masu adana makamashi. Fitilun LED sun fi hasken tungsten incandescent inganci 90% kuma sun fi hasken 60% inganci da makamashi. A zamanin yau, duk nau'ikan fitilun titi, fitilun haske da fitilun mota suna amfani da fina-finan haske na LED waɗanda MOCVD ke samarwa.
2. Zafin ajiya
Zafin ruɓewar mahaɗan ƙarfe na halitta yana da ƙasa, kuma zafin ajiyar ya fi na HCVD ƙasa. Zafin ajiyar TiN da MOCVD ya ajiye zai iya raguwa zuwa kusan digiri 500.
– An fitar da wannan labarin ne dagainjin shafa injin injinGuangdong Zhenhua
Lokacin Saƙo: Oktoba-20-2023