Kaydinta Uumiga Kiimikada ee Birta Dabiiciga ah

Kaydinta uumiga kiimikada dabiiciga ah ee birta ah (MOCVD), isha laga helo walxaha gaaska leh waa gaaska isku-dhafka dabiiciga ah ee birta ah, habka falcelinta aasaasiga ah ee dhigistana wuxuu la mid yahay CVD.

1. Gaaska cayriin ee MOCVD

Isha gaaska ee loo isticmaalo MOCVD waa gaaska isku-dhafka birta-organic (MOC). Isku-dhafka birta-organic waa isku-dhafan xasilloon oo lagu soo saaro isku-darka walxaha dabiiciga ah iyo biraha. Isku-dhafka dabiiciga ah waxay leeyihiin alkyl, aromatic. Alkyl waxaa ka mid ah methyl, ethyl, propyl, iyo butyl. Alkyl waxaa ka mid ah methyl, ethyl, propyl, iyo butyl. Udgoon oo ay ku jiraan phenyl homologues, trimethyl gallium, [Ga(CH)₃)₃], aluminium trimethyl [Al(CH₃)₃] si loogu dhejiyo microelectronics, optoelectronics, semiconductors saddexda, shan iskudhis oo ku jira lakabka filimka, sida Ga(CH)₃)₃ ammonia-na waxay ku jiri kartaa wafer silicon ama safayr koritaanka epitaxial ee laambadaha LED ee lakabka iftiimaya ee InGaN. Laambadaha LED-ka waxay ka badan yihiin kuwa tungsten incandescent-ka ee tamarta badbaadiya 90%, in ka badan 60% laambadaha iftiimiya ee tamarta badbaadiya. Laambadaha LED-ka waxay 90% ka waxtar badan yihiin laambadaha iftiinka ee tungsten iyo 60% ka waxtar badan yihiin laambadaha iftiinka ee fluorescent-ka. Maalmahan, dhammaan noocyada laambadaha waddooyinka, laambadaha iftiinka iyo laambadaha baabuurta waxay asal ahaan isticmaalaan filimada iftiinka LED-ka ee soo saara MOCVD.

2. Heerkulka dhigista

Heerkulka kala-baxa ee isku-dhafka biraha dabiiciga ah waa hooseeyaa, heerkulka dhigistana waa ka hooseeya kan HCVD. Heerkulka dhigista ee TiN ee ay MOCVD dhigtay waxaa loo dhimi karaa ilaa 500 digrii.

– Maqaalkan waxaa soo saaray ’’Qoraalkan waxaa soo saaray ’’soo saaraha mashiinka dahaadhka faakuumkaGuangdong Zhenhua