Gushyira umwuka mu byuma bikoresha ikoranabuhanga (MOCVD), isoko y'ibintu bivamo umwuka ni umwuka uvamo umwuka mu byuma bikoresha ikoranabuhanga, kandi inzira y'ibanze yo gushyira umwuka mu byuma isa na CVD.
1. Gazi mbisi ya MOCVD
Isoko y'umwuka ikoreshwa muri MOCVD ni gaze y'icyuma-organic (MOC). Ibinyabutabire by'icyuma-organic ni ibintu bihoraho bivangwa no guhuza ibintu by'umwimerere n'ibyuma. Ibinyabutabire by'umwimerere bifite alkyl, aromatic. Alkyl irimo methyl, ethyl, propyl, na butyl. Alkyl irimo methyl, ethyl, propyl, na butyl. Impumuro nziza irimo phenyl homologues, trimethyl gallium, [Ga(CH2]3)3], trimethyl aluminum [Al(CH3)3] yo gushyiramo ibikoresho bya elegitoroniki, optoelectronics, semiconductors mu bintu bitatu, bitanu mu rwego rwa filime, nka Ga (CH3)3 na ammonia bishobora kuba mu itara rya silikoni cyangwa safiro ku mikurire ya epitaxial y'amatara ya LED mu rumuri rwa InGaN. Amatara ya LED aroroshya ingufu kurusha amatara ya tungsten aroroshya ingufu 90%, arenga 60% by'amatara ya fluorescent. Amatara ya LED aroroshya ingufu kurusha amatara ya tungsten aroroshya ingufu 90% na 60% by'amatara ya fluorescent. Muri iki gihe, ubwoko bwose bw'amatara yo ku muhanda, amatara yo gucana n'amatara y'imodoka ahanini bikoresha filime zitanga urumuri za LED zakozwe na MOCVD.
2. Ubushyuhe bwo gushyiramo
Ubushyuhe bwo kubora kw'ibinyabutabire by'ibyuma bikomoka ku bimera ni buke, kandi ubushyuhe bwo kubora buri hasi ugereranije n'ubwa HCVD. Ubushyuhe bwo kubora bwa TiN butangwa na MOCVD bushobora kugabanuka kugeza kuri dogere 500.
–Iyi nkuru yasohotse nauruganda rukora imashini zikora imashini zikoresha umwuka ushyushyeGuangdong Zhenhua
Igihe cyo kohereza: Ukwakira-20-2023