Ko te putunga matū waro konganuku (MOCVD), ko te pūtake o te rauemi hau he matū waro konganuku, ā, he rite te tukanga tauhohenga taketake o te putunga ki te CVD.
1.MOCVD hau mata
Ko te pūtake hau e whakamahia ana mō te MOCVD ko te hau matū whakarewa-waro (MOC). Ko ngā matū whakarewa-waro he matū pumau e hangaia ana mā te whakakotahi i ngā matū waro me ngā konganuku. Kei roto i ngā matū waro he alkyl, he kakara. Kei roto i te alkyl te methyl, te ethyl, te propyl, me te butyl. Kei roto i te alkyl te methyl, te ethyl, te propyl, me te butyl. Kei roto i ngā kakara tae atu ki ngā phenyl homologues, te trimethyl gallium, [Ga(CH3)3], konumohe trimethyl [Al(CH3)3] mō te whakatakoto i ngā hikohiko moroiti, ngā hikohiko opto, ngā haurua-ira i roto i ngā matū e toru, e rima i roto i te paparanga kiriata, pērā i te Ga(CH3)3 ā, ka taea te whakauru i te haukini ki roto i te anga silicon, te hapaira rānei i runga i te tipu epitaxial o ngā rama LED i roto i te paparanga luminescent InGaN. He nui ake te penapena hiko o ngā rama LED i te tungsten incandescent i te 90%, neke atu i te 60% ngā rama fluorescent penapena hiko. He 90% te penapena hiko o ngā rama LED i te tungsten incandescent i te 90%, ā, he 60% te penapena hiko o ngā rama fluorescent. I ēnei rā, ko ngā momo rama tiriti katoa, ngā rama rama me ngā rama motuka e whakamahi ana i ngā kiriata rama LED i hangaia e MOCVD.
2. Te pāmahana whakatakoto
He iti te pāmahana pirau o ngā matū whakarewa waro, ā, he iti iho te pāmahana whakatakotoranga i tērā o te HCVD. Ka taea te whakaiti i te pāmahana whakatakotoranga o te TiN i whakatakotorangahia e te MOCVD ki te 500 nekehanga.
–Nā tekaihanga mīhini paninga korehauGuangdong Zhenhua
Wā tuku: Oketopa-20-2023