Ho beoa ha mouoane oa lik'hemik'hale tsa organic tsa tšepe (MOCVD), mohloli oa thepa ea khase ke khase ea metsoako ea organic ea tšepe, 'me mokhoa oa motheo oa karabelo ea ho beoa ha mouoane o tšoana le oa CVD.
1.MOCVD khase e tala
Mohloli oa khase o sebelisoang bakeng sa MOCVD ke khase ea tšepe-organic compound (MOC). Metsoako ea tšepe-organic ke metsoako e tsitsitseng e hlahisoang ka ho kopanya lintho tse phelang le litšepe. Metsoako ea tlhaho e na le alkyl, aromatic. Alkyl e kenyelletsa methyl, ethyl, propyl, le butyl. Alkyl e kenyelletsa methyl, ethyl, propyl, le butyl. Monko o monate o kenyelletsang phenyl homologues, trimethyl gallium, [Ga(CH2)3)3], aluminium ea trimethyl [Al(CH3)3] bakeng sa ho beoa ha di-microelectronics, di-optoelectronics, di-semiconductor metswakong e meraro, e mehlano lera la filimi, jwalo ka Ga(CH3)3 'Me ammonia e ka ba ka har'a silicon wafer kapa safire kholong ea epitaxial ea mabone a LED ka har'a lera la InGaN luminescent. Mabone a LED a boloka matla a fetang 90% ho feta tungsten incandescent, mabone a fetang 60% a bolokang matla. Mabone a LED a boloka matla a fetang 90% ho feta mabone a tungsten incandescent le 60% ho feta mabone a fluorescent. Matsatsing ana, mefuta eohle ea mabone a seterateng, mabone a mabone le mabone a likoloi ha e le hantle a sebelisa lifilimi tse ntšang leseli la LED tse hlahisoang ke MOCVD.
2. Mocheso oa ho beha sebaka
Mocheso oa ho bola ha metsoako ea tšepe ea tlhaho o tlase, 'me mocheso oa ho boloka o tlase ho feta oa HCVD. Mocheso oa ho boloka TiN o bolokiloeng ke MOCVD o ka fokotsoa ho fihlela ho likhato tse ka bang 500.
–Sengoloa sena se lokollotsoe kemoetsi oa mochini oa ho roala ka vacuum cleanerGuangdong Zhenhua
Nako ea poso: Mphalane-20-2023