Cov pa roj carbon dioxide uas ua los ntawm cov hlau organic chemical vapor deposition (MOCVD), qhov chaw ntawm cov khoom siv roj yog cov pa roj organic compound hlau, thiab cov txheej txheem tshuaj tiv thaiv yooj yim ntawm kev tso cov pa roj zoo ib yam li CVD.
1.MOCVD cov roj nyoos
Cov pa roj siv rau MOCVD yog cov pa roj hlau-organic compound (MOC). Cov hlau-organic compounds yog cov tshuaj ruaj khov uas tsim los ntawm kev sib xyaw cov organic nrog cov hlau. Cov organic compounds muaj alkyl, aromatic. Alkyl suav nrog methyl, ethyl, propyl, thiab butyl. Alkyl suav nrog methyl, ethyl, propyl, thiab butyl. Aromatic suav nrog phenyl homologues, trimethyl gallium, [Ga(CH3)3], trimethyl txhuas [Al(CH3]3)3] rau qhov kev tso cov microelectronics, optoelectronics, semiconductors hauv peb, tsib lub tebchaw hauv txheej zaj duab xis, xws li Ga (CH3)3 thiab ammonia tuaj yeem nyob rau hauv silicon wafer lossis sapphire ntawm epitaxial kev loj hlob ntawm LED teeb hauv InGaN luminescent txheej. LED teeb yog ntau dua li tungsten incandescent txuag hluav taws xob 90%, ntau dua 60% txuag hluav taws xob fluorescent teeb. LED teeb yog 90% txuag hluav taws xob ntau dua li tungsten incandescent teeb thiab 60% txuag hluav taws xob ntau dua li fluorescent teeb. Niaj hnub no, txhua yam teeb ntawm txoj kev, teeb pom kev zoo thiab teeb tsheb feem ntau siv LED teeb-emitting zaj duab xis tsim los ntawm MOCVD.
2. Qhov kub thiab txias ntawm qhov tso tawm
Qhov kub ntawm cov organic hlau sib xyaw ua ke qis, thiab qhov kub ntawm qhov tso tawm qis dua li ntawm HCVD. Qhov kub ntawm TiN uas MOCVD tso tawm tuaj yeem txo kom txog li 500 degree.
– Tsab xov xwm no yog tso tawm los ntawmlub tshuab nqus tsev txheej tshuab chaw tsim khoomGuangdong Zhenhua
Lub sijhawm tshaj tawm: Lub Kaum Hli-20-2023