Metal organic chemical vapor deposition (MOCVD), mohloli oa lintho tse nang le khase ke metal organic compound gase, 'me mokhoa oa motheo oa ho etsa deposition o tšoana le CVD.
1.MOCVD khase e tala
Mohloli oa khase o sebelisoang bakeng sa MOCVD ke metal-organic compound (MOC) khase. Metal-organic compounds ke metsoako e tsitsitseng e hlahisoang ka ho kopanya lintho tse phelang le tšepe. Metsoako ea tlhaho e na le alkyl, monko o monate. Alkyl e kenyelletsa methyl, ethyl, propyl, le butyl. Alkyl e kenyelletsa methyl, ethyl, propyl, le butyl. Monko o monate ho kenyelletsa phenyl homologues, trimethyl gallium, [Ga(CH3)3], trimethyl aluminium [Al(CH3)3] bakeng sa ho beha li-microelectronics, optoelectronics, semiconductors ka har'a metsoako e meraro, e mehlano ea lera la filimi, joalo ka Ga(CH)3)3 'me ammonia e ka ba ka har'a silicon wafer kapa safire ka kholo ea epitaxial ea mabone a LED ka lera la luminescent la InGaN. Mabone a LED a feta tungsten a boloka matla a 90%, mabone a fluorescent a fetang 60%. Mabone a LED a sebetsa hantle ka 90% ho feta mabone a incandescent a tungsten le 60% ho feta mabone a fluorescent. Matsatsing ana, mefuta eohle ea mabone a seterateng, mabone a bonesang le mabone a koloi ha e le hantle a sebelisa lifilimi tsa LED tse hlahisoang ke MOCVD.
2. Mocheso oa ho beha
Mocheso oa ho bola oa metsoako ea tšepe ea manyolo o tlase, 'me mocheso oa deposition o tlase ho feta oa HCVD. Thempereichara ea deposition ea TiN e kentsoeng ke MOCVD e ka fokotsoa ho isa ho likhato tse 500.
-Sengoliloeng sena se lokolloa kemoetsi oa mochine oa vacuum coatingGuangdong Zhenhua
Nako ea poso: Oct-20-2023