Kaydinta uumiga kiimikada ee birta (MOCVD), isha walxaha gaasku waa gaaska ka samaysan organic birta, iyo habka falcelinta aasaasiga ah ee dhigista waxay la mid tahay CVD.
1.MOCVD gaaska ceeriin
Ilaha gaaska ee loo isticmaalo MOCVD waa gaaska isku-dhafka birta-organic (MOC). Iskudhisyada birta-organic waa isku-dhisyo xasiloon oo la soo saaro iyadoo la isku darayo walxaha organic iyo biraha. Xeryahooda dabiiciga ah waxay leeyihiin alkyl, caraf udgoon. Alkyl waxaa ka mid ah methyl, ethyl, propyl, iyo butyl. Alkyl waxaa ka mid ah methyl, ethyl, propyl, iyo butyl. Udgoon ay ku jiraan phenyl homologues, trimethyl gallium, [Ga(CH3)3], trimethyl aluminium [Al(CH3)3] loogu talagalay dhigista microelectronics, optoelectronics, semiconductors ee saddexda, shan qaybood ee lakabka filimka, sida Ga (CH)3)3 iyo ammonia waxay ku jiri kartaa wafer silikoon ama sapphire oo ku saabsan koritaanka epitaxial ee nalalka LED ee lakabka iftiinka InGaN. Laambadaha LED-ku waxay ka badan yihiin tamar-badbaadinta tamarta tungsten-ka 90%, in ka badan 60% nalalka fluorescent ee tamarta badbaadiya. Laambadaha LED-ku waxay 90% ka tamar badan yihiin nalalka tungsten iyo 60% tamar ka tayo fiican nalalka fluorescent. Maalmahan, dhammaan noocyada kala duwan ee laambadaha waddooyinka, nalalka iftiinka iyo nalalka baabuurta ayaa asal ahaan isticmaala aflaanta iftiiminta iftiinka LED-ka ee ay soo saarto MOCVD.
2. heerkulka dhigaalka
Heerkulka burburka ee isku dhafka birta organic waa hooseeyaa, heerkulka dhigistana wuu ka hooseeyaa kan HCVD. Heerkulka dhigaalka TiN ee ay dhigtay MOCVD waa la dhimi karaa ilaa 500 darajo.
–Maqaalkan waxa soo saaraysoo saaraha mashiinka daahan vacuumGuangdong Zhenhua
Waqtiga boostada: Oct-20-2023