1. Yakanakira firimu rekudzivirira kupisa nekuputira. Kuchinja nekukurumidza kwe electrode polarity kunogona kushandiswa kuputira zvakananga zvinangwa zvekudzivirira kupisa kuti uwane mafirimu ekudzivirira kupisa. Kana sosi yemagetsi yeDC ikashandiswa kuputira nekukanda firimu rekudzivirira kupisa, firimu rekudzivirira kupisa rinovhara ma positive ions kuti asapinde mu cathode, zvichiita kuti positive ions accumulation layer, iyo inogona kuputsika nekubatidzwa. Mushure mekuisa firimu rekudzivirira kupisa pa anode, ma electron anovharwa kuti asapinde mu anode, zvichikonzera kuti anode isashande. Paunoshandisa RF power source kuputira firimu rekudzivirira kupisa, nekuda kwekuchinjana kwe polarity yema electrodes, positive charges dzakaunganidzwa pa cathode muhafu yekutanga ye cycle dzichadzimwa nema electron muhafu yechipiri ye cycle, uye ma electron akaunganidzwa pa anode achadzimwa nema positive ions. Maitiro akasiyana muhafu yechipiri ye cycle anogona kubvisa kuunganidzwa kwe charges pa electrode, uye maitiro ekuburitsa anogona kuenderera mberi zvakanaka.
2. Maelectrode ane mafrequency akakwirira anogadzira self biause. Muchishandiso cheRF chine chimiro che electrode chakatsetseka, maelectrode ane mafrequency akakwira ari mudunhu achishandisa capacitive coupling matching anogadzira self biause voltage. Musiyano mukuru uripo pakati pekumhanya kwema electron nekumhanya kwema ion mu discharge unogonesa ma electron kuwana kumhanya kukuru kwekufamba panguva yakatarwa, nepo kumhanya kwema ion kunononoka kuchikonzera kuunganidzwa. Electrode ine mafrequency akakwira iri pa negative potential kwechikamu chikuru che cycle yega yega, zvichikonzera negative voltage panzvimbo, inova chiitiko chekuzvifunga kwe electrode ine mafrequency akakwira.
Kuzvifunga kunokonzerwa neRF discharge electrode kunokurumidza kubhomba kweion kwe cathode electrode kuti irambe ichiburitsa ma secondary electrons kuti irambe ichiburitsa, uye kuzvifunga kunobata basa rakafanana nekudonha kwe cathode muDC glow discharge. Kunyangwe uchishandisa RF power supply, discharge inogona kugadzikana nekuda kwe self bias voltage inogadzirwa ne high-frequency electrode inosvika 500-1000V.
3. Kubuda kweRadio frequency kunoita basa rakakosha mukubuda kwechiedza chemumhepo uye dielectric barrier glow discharge yakazounzwa gare gare.
Nguva yekutumira: Chikumi-21-2023