Kugwiritsa ntchito kutulutsa kwa RF

1. Ndizabwino pa filimu yothira ma sputter ndi plating insulation. Kusintha mwachangu kwa polarity ya electrode kungagwiritsidwe ntchito kuthira ma sputter mwachindunji kuti mupeze mafilimu othira ma insulation. Ngati gwero lamagetsi la DC ligwiritsidwa ntchito kuthira ma sputter ndi kuyika filimu yothira ma insulation, filimu yothira ma insulation imaletsa ma ion abwino kulowa mu cathode, ndikupanga positive ion accumulation layer, yomwe ingathe kusweka ndi kuyaka. Pambuyo poyika filimu yothira ma insulation pa anode, ma electron amatsekedwa kulowa mu anode, zomwe zimapangitsa kuti anode itayike. Mukagwiritsa ntchito gwero lamagetsi la RF kuphimba filimu yothira ma insulation, chifukwa cha polarity yosinthana ya ma electrode, ma positive charges omwe asonkhanitsidwa pa cathode mu theka loyamba la kuzungulira adzathetsedwa ndi ma electron mu theka lachiwiri la kuzungulira, ndipo ma electron omwe asonkhanitsidwa pa anode adzathetsedwa ndi ma positive ion. Njira yosiyana mu theka lachiwiri la kuzungulira ikhoza kuthetsa kusonkhanitsa kwa ma charges pa electrode, ndipo njira yotulutsira ma ion imatha kupitilira mwachizolowezi.

2. Ma electrode othamanga kwambiri amapanga self bia. Mu chipangizo cha RF chokhala ndi kapangidwe ka electrode yosalala, ma electrode othamanga kwambiri mu dera pogwiritsa ntchito capacitive coupling matching amapanga self bia voltage. Kusiyana kwakukulu pakati pa liwiro la electron migration ndi liwiro la ion migration mu discharge kumathandiza ma electron kuti akwaniritse liwiro lalikulu la mayendedwe panthawi inayake, pomwe liwiro la ion locheperako limayambitsa kusonkhanitsa. Electrode yothamanga kwambiri imakhala ndi mphamvu yoyipa nthawi zambiri ya kuzungulira kulikonse, zomwe zimapangitsa kuti voltage yoyipa ikhale pamtunda, zomwe zimapangitsa kuti electrode yothamanga kwambiri ikhale self bia.

Kudzipatula komwe kumapangidwa ndi electrode yotulutsa RF kumathandizira kuphulika kwa ma ion a electrode ya cathode kuti itulutse ma electron achiwiri mosalekeza kuti ipitirize kutulutsa, ndipo kudzipatula komwe kumafanana ndi kuchepa kwa cathode mu kutulutsa kuwala kwa DC. Ngakhale kugwiritsa ntchito mphamvu ya RF, kutulutsa kumatha kukhala kokhazikika chifukwa cha mphamvu ya self bias yomwe imapangidwa ndi electrode ya high-frequency kufika pa 500-1000V.

3. Kutulutsa kwa ma radio frequency kumagwira ntchito yofunika kwambiri pakutulutsa kuwala kwa mpweya ndi dielectric barrier glow discharge yomwe idayambitsidwa pambuyo pake.