1.Beneficial for sputtering and plating insulation film. Iko kukurumidza shanduko mu electrode polarity inogona kushandiswa kunanga sputter insulating zvinangwa kuti uwane insulating mafirimu. Kana sosi yemagetsi yeDC ikashandiswa kupuruzira uye kuisa firimu rekuisa, iyo firimu yekudzivirira inovharisa maion akanaka kubva pakupinda mucathode, ichigadzira iyo yakanaka ion accumulation layer, inogara ichiputsika uye kubatidza. Mushure mekuisa firimu rinodzivirira pane anode, maerekitironi anovharwa kuti asapinda muanode, zvichikonzera chiitiko chekunyangarika kweanode. Paunenge uchishandisa simba reRF kupfekedza firimu rekudzivirira, nekuda kwekuchinjana polarity yemagetsi, machaji akanaka akaunganidzirwa pacathode muhafu yekutanga yekutenderera anozoderedzwa nemaerekitironi muhafu yechipiri yekutenderera, uye maerekitironi akaunganirwa pane anode anozoderedzwa nemaoni akanaka. Iyo inopesana maitiro muhafu yechipiri kutenderera inogona kubvisa kuunganidzwa kwemhosva pane electrode, uye nzira yekuburitsa inogona kuenderera zvakajairika.
2.High frequency electrodes inogadzira kuzvisarudzira. Muchigadzirwa cheRF chine flat electrode chimiro, iwo epamusoro-frequency maelectrodes ari mudunhu achishandisa capacitive coupling matching anogadzira self bias voltage. Musiyano mukuru uripo pakati pekumhanya kweerekitironi nekumhanya kweayoni pakubuda kunoita kuti maerekitironi awane kumhanya kukuru kwekufamba panguva yakatarwa, ukuwo kumhanya kunononoka kweiyoni kuchikonzera kuungana. Iyo yakakwira-frequency electrode iri pakugona kwakashata kweakawanda ega ega kutenderera, zvichiita kuti pave nevoltage yakaipa panzvimbo, inova chiitiko chekuzvisarudzira chepamusoro-frequency electrode.
Iyo self bias inogadzirwa neRF discharge electrode inomhanyisa bombardment yeion ye cathode electrode kuti irambe ichiburitsa maerekitironi eSekondari kuchengetedza maitiro ekuburitsa, uye iyo self bias inoita basa rakafanana nekudonha kwecathode muDC glow discharge. Kunyangwe uchishandisa magetsi eRF, kuburitsa kunogona kugadzikana nekuda kweiyo yega bias voltage inogadzirwa neiyo yakakwira-frequency electrode inosvika 500-1000V.
3. Radio frequency discharge inoita basa rakakosha mumhepo yekumanikidza kupenya kubuda uye dielectric barriers glow discharge inounzwa gare gare.
Nguva yekutumira: Jun-21-2023