(1) Gasi rinoputira mvura. Gasi rinoputira mvura rinofanira kunge riine hunhu hwekuti rinoputira mvura yakawanda, harina kusimba pachinhu charinoda, rakachipa, riri nyore kuwana kuchena kwakanyanya uye mamwe maitiro. Kazhinji, argon ndiyo gasi rinoputira mvura rakanakisisa.
(2) Voltage yekuputira uye voltage ye substrate. Aya ma parameter maviri ane simba guru pahunhu hwefirimu, voltage yekuputira haingokanganisi chete mwero wekuisa, asiwo inokanganisa zvakanyanya chimiro chefirimu yakachengetwa. Substrate potential inokanganisa zvakananga kuyerera kwe electron kana ion yejekiseni revanhu. Kana substrate yakamira pasi, inoputirwa nema electron akaenzana; kana substrate yakasungirirwa, iri munzvimbo yekuburitsa chiedza kuti iwane mukana wekusagadzikana zvishoma maererano nevhu re suspension potential V1, uye mukana we plasma yakatenderedza substrate V2 kuti ive yakakwira kupfuura mukana we substrate, izvo zvinozopa mukana wekuti ma electron nema positive ions aputirwe, zvichikonzera shanduko muukobvu hwefirimu, chimiro, nezvimwe zvinhu: kana substrate ikashandisa nemaune bias voltage, zvekuti zvinoenderana ne polarity yekugamuchirwa kwemagetsi kwema electron kana ma ion, haingogoni kuchenesa substrate nekuwedzera kunamira kwefirimu, asiwo kushandura chimiro chefirimu. Mu radio frequency sputtering coating, kugadzirira conductor membrane pamwe ne DC bias: kugadzirira dielectric membrane pamwe ne tuning bias.
(3) Kupisa kwepasi pevhu. Kupisa kwepasi pevhu kune simba guru pakumanikidzwa kwemukati mefirimu, izvo zvinokonzerwa nekupisa kunokanganisa zvakananga mashandiro emaatomu akaiswa papasi pevhu, nokudaro zvichisarudza kuumbwa kwefirimu, chimiro, avhareji yehukuru hwetsanga, kurongeka kwekristaro uye kusakwana kwayo.
–Chinyorwa ichi chakaburitswa namugadziri wemuchina wevacuum coatingGuangdong Zhenhua
Nguva yekutumira: Ndira-05-2024