(1) Gazi isuka. Gazi isuka igomba kugira imiterere yo gusuka cyane, idakora neza ku bikoresho byifuzwa, ihendutse, yoroshye kubona ubuziranenge bwinshi n'ibindi biranga. Muri rusange, argon ni yo gaze isuka neza cyane.
(2) Voltage yo gusohora n'amashanyarazi ya substrate. Ibi bipimo bibiri bigira ingaruka zikomeye ku miterere ya filime, voltage yo gusohora ntigira ingaruka gusa ku gipimo cyo gushyiramo, ahubwo inagira ingaruka zikomeye ku miterere ya filime yashyizwemo. Ubushobozi bwo gusohora bigira ingaruka zitaziguye ku rujya n'uruza rwa electron cyangwa ioni mu inshinge z'abantu. Iyo substrate ihagaze, iterwa na electron zingana; iyo substrate ihagaze, iba iri mu gace gasohora urumuri kugira ngo ibone ubushobozi buke ugereranyije n'ubutaka bwa suspension potential V1, kandi ubushobozi bwa plasma ikikije substrate V2 bukaba hejuru y'ubushobozi bwa substrate, bizatuma electron na ioni nziza zikwirakwira ku rugero runaka, bigatera impinduka mu bugari bwa filime, imiterere, n'ibindi biranga: iyo substrate ikoresheje ingufu za bias nkana, ku buryo ijyanye n'uburyo electron cyangwa ioni zikwirakwira mu amashanyarazi, ntabwo ishobora gusukura substrate no kongera uburyo filime ifatana, ahubwo inahindura imiterere ya filime. Mu irangi rya radio frequency sputtering, gutegura membrane y'umuyoboro w'amashanyarazi hamwe na DC bias: gutegura membrane ya dielectric hamwe na tuning bias.
(3) Ubushyuhe bw'inyuma y'urukuta. Ubushyuhe bw'inyuma y'urukuta bugira ingaruka zikomeye ku muvuduko w'imbere w'urukuta, bitewe n'ubushyuhe bugira ingaruka zitaziguye ku mikorere ya atome zibitswe ku rukuta, bityo bigagena imiterere y'urukuta, imiterere, ingano mpuzandengo y'ibinyampeke, icyerekezo cya kristu n'uko kitarangiye.
–Iyi nkuru yasohotse nauruganda rukora imashini zikora imashini zikoresha umwuka ushyushyeGuangdong Zhenhua
Igihe cyo kohereza: Mutarama-05-2024