(1) Iskar gas mai fitar da iska. Iskar gas mai fitar da iska yakamata ta kasance tana da halaye na yawan fitar da iska, rashin shigar da kayan da aka nufa, mai arha, mai sauƙin samu da sauran halaye. Gabaɗaya, argon shine iskar gas mai fitar da iska mafi kyau.
(2) Ƙarfin wutar lantarki da ƙarfin substrate. Waɗannan sigogi guda biyu suna da tasiri mai mahimmanci akan halayen fim ɗin, ƙarfin wutar lantarki na sputtering ba wai kawai yana shafar ƙimar ajiya ba, har ma yana shafar tsarin fim ɗin da aka ajiye sosai. Ƙarfin substrate yana shafar kwararar electron ko ion kai tsaye na allurar ɗan adam. Idan substrate ɗin ya kasance ƙasa, ana jefa shi da electrons daidai; idan substrate ɗin ya tsaya, yana cikin yankin fitarwar haske don samun ɗan ƙaramin yuwuwar mara kyau dangane da ƙasan yuwuwar dakatarwa V1, kuma yuwuwar plasma da ke kewaye da substrate V2 ya fi ƙarfin substrate, wanda zai haifar da wani matakin fashewa na electrons da ions masu kyau, wanda ke haifar da canje-canje a cikin kauri na fim ɗin, abun da ke ciki, da sauran halaye: idan substrate ɗin ya yi amfani da ƙarfin bias da gangan, don haka ya yi daidai da polarity na karɓar electrons ko ions na lantarki, ba wai kawai zai iya tsarkake substrate ɗin da haɓaka mannewar fim ɗin ba, har ma yana canza tsarin fim ɗin. A cikin murfin sputtering na mitar rediyo, shirye-shiryen membrane mai jagora tare da bias DC: shirye-shiryen membrane dielectric tare da bias daidaitawa.
(3) Zafin ƙasa. Zafin ƙasa yana da tasiri sosai kan matsin lamba na ciki na fim ɗin, wanda hakan ya faru ne saboda zafin yana shafar ayyukan ƙwayoyin halittar da aka ajiye a kan substrate kai tsaye, don haka yana tantance abun da ke cikin fim ɗin, tsari, matsakaicin girman hatsi, yanayin lu'ulu'u da rashin cikawa.
– An fitar da wannan labarin ne dagainjin shafa injin injinGuangdong Zhenhua
Lokacin Saƙo: Janairu-05-2024