(1) Cov roj sputtering. Cov roj sputtering yuav tsum muaj cov yam ntxwv ntawm cov khoom siv sputtering siab, inert rau cov khoom siv, pheej yig, yooj yim kom tau txais kev ntshiab siab thiab lwm yam ntxwv. Feem ntau hais lus, argon yog cov roj sputtering zoo tshaj plaws.
(2) Lub zog hluav taws xob sputtering thiab lub zog hluav taws xob substrate. Ob qho kev ntsuas no muaj qhov cuam tshuam tseem ceeb rau cov yam ntxwv ntawm zaj duab xis, lub zog hluav taws xob sputtering tsis yog tsuas yog cuam tshuam rau qhov nqi tso tawm xwb, tab sis kuj cuam tshuam rau cov qauv ntawm zaj duab xis tso tawm. Lub peev xwm substrate ncaj qha cuam tshuam rau electron lossis ion ntws ntawm tib neeg txhaj tshuaj. Yog tias lub substrate yog grounded, nws yog bombarded los ntawm cov electrons sib npaug; yog tias lub substrate yog suspensioned, nws yog nyob rau hauv thaj chaw tso tawm kom tau txais lub peev xwm me ntsis tsis zoo piv rau hauv av ntawm lub peev xwm suspension V1, thiab lub peev xwm ntawm plasma nyob ib puag ncig lub substrate V2 kom siab dua lub peev xwm substrate, uas yuav ua rau muaj qee qib ntawm bombardment ntawm electrons thiab zoo ions, ua rau muaj kev hloov pauv hauv zaj duab xis thickness, composition, thiab lwm yam ntxwv: yog tias lub substrate txhob txwm siv lub zog hluav taws xob bias, yog li nws yog raws li polarity ntawm hluav taws xob txais ntawm electrons lossis ions, tsis yog tsuas yog tuaj yeem purify lub substrate thiab txhim kho qhov adhesion ntawm zaj duab xis, tab sis kuj hloov cov qauv ntawm zaj duab xis. Hauv lub xov tooj cua zaus sputtering txheej, kev npaj ntawm conductor membrane ntxiv rau DC bias: kev npaj ntawm dielectric membrane ntxiv rau tuning bias.
(3) Qhov kub ntawm cov khoom siv. Qhov kub ntawm cov khoom siv muaj feem cuam tshuam ntau dua rau kev ntxhov siab sab hauv ntawm zaj duab xis, uas yog vim qhov kub thiab txias cuam tshuam ncaj qha rau kev ua haujlwm ntawm cov atoms tso rau ntawm cov khoom siv, yog li txiav txim siab qhov sib xyaw ntawm zaj duab xis, cov qauv, qhov nruab nrab ntawm cov noob, kev taw qhia siv lead ua thiab qhov tsis tiav.
– Tsab xov xwm no yog tso tawm los ntawmlub tshuab nqus tsev txheej tshuab chaw tsim khoomGuangdong Zhenhua
Lub sijhawm tshaj tawm: Lub Ib Hlis-05-2024