(1) Kupopotera gasi. Iyo gasi yekupuruzira inofanirwa kuve nehunhu hwegoho rekurutsira, inert kune yakanangana nezvinhu, zvakachipa, zviri nyore kuwana kuchena kwepamusoro uye humwe hunhu. Kazhinji kutaura, argon ndiyo yakanyanya kunaka yekupuruzira gasi.
(2) Sputtering voltage uye substrate voltage. Aya ma paramita maviri ane zvakakosha pamaitiro emufirimu, sputtering voltage haingokanganisa chiyero chekuisa chete, asiwo zvakanyanya kukanganisa chimiro chefirimu rakaiswa. Substrate inogona kukanganisa zvakananga erekitironi kana ion kuyerera kwejekiseni remunhu. Kana iyo substrate yakadzikwa, inoputirwa nemaerekitironi akaenzana; kana iyo substrate ikamiswa, iri munzvimbo inoyerera inopenya kuti iwane mukana wakashata zvishoma unoenderana nepasi reiyo kuturika inogona V1, uye kugona kweplasma kutenderedza substrate V2 kuve yakakwira kupfuura iyo substrate inogona, izvo zvinopa kukwira kune imwe dhigirii yekubhomba kwemaerekitironi nemaion akanaka, zvichikonzera shanduko mune imwe firimu hunhu, kuumbwa kweiyo bhaisikopo. inoenderana ne polarity yekugamuchirwa kwemagetsi emagetsi kana ions, kwete chete inogona kuchenesa substrate uye kuwedzera kunamatira kwefirimu, asi zvakare shandura chimiro chefirimu. Mune redhiyo frequency sputtering coating, kugadzirira kweconductor membrane pamwe neDC kurerekera: kugadzirira kwedielectric membrane pamwe netuning bias.
(3) Substrate tembiricha. Substrate tembiricha ine simba rakakura pakushushikana kwemukati memufirimu, izvo zvinokonzerwa nekupisa kunokanganisa zvakananga basa reatomu akaiswa pane substrate, nekudaro kuona kuumbwa kwefirimu, chimiro, avhareji saizi yezviyo, kutariswa kwekristaro uye kusakwana.
-Chinyorwa ichi chakaburitswa navacuum coating machine mugadziriGuangdong Zhenhua
Nguva yekutumira: Jan-05-2024