u'amea fa'aletino ausa vaila'au (MOCVD), o le puna o mea kasa o u'amea fa'akalamu kasa, ma o le faiga fa'avae tali o le deposition e tutusa ma le CVD.
1.MOCVD kasa mata
O le kasa o lo'o fa'aaogaina mo le MOCVD o le kasa-organic compound (MOC). Metala-organic compound o mea mautu e gaosia e ala i le tuʻufaʻatasia o mea faʻaletino ma metala. O fa'alapotopotoga fa'aletino e iai le alkyl, manogi. Alkyl e aofia ai le methyl, ethyl, propyl, ma le butyl. Alkyl e aofia ai le methyl, ethyl, propyl, ma le butyl. O mea manogi e aofia ai phenyl homologues, trimethyl gallium, [Ga(CH3)3], alumini trimethyl [Al(CH3)3] mo le faʻapipiʻiina o microelectronics, optoelectronics, semiconductors i le tolu, lima faʻapipiʻi i le ata tifaga, e pei o Ga (CH).3)3 ma ammonia e mafai ona i totonu o le kasa masima po o le safaira i luga o le epitaxial tuputupu aʻe o moli LED i le InGaN luminescent layer. Lamepa ta'ita'i e sili atu nai lo tungsten incandescent malosi-sefe 90%, sili atu nai lo le 60% malosi-sefe moli fluorescent. Lamepa LED e 90% sili atu le malosi nai lo moli tungsten ma 60% sili atu le malosi nai lo lamepa fluorescent. I aso nei, o ituaiga uma o moli auala, moli moli ma moli taʻavale e masani ona faʻaaogaina ata tifaga faʻamalama moli na gaosia e le MOCVD.
2. Teuga vevela
O le vevela o le fa'apalapala o fa'ameamea fa'aola e maualalo, ma o le vevela o le fa'aputu e maualalo ifo nai lo le HCVD. O le vevela o le TiN na teuina e le MOCVD e mafai ona faʻaititia ile 500 tikeri.
–O lenei tusiga ua tatalaina emasini fa'apipi'i gaogao gaosimeaGuangdong Zhenhua
Taimi meli: Oke-20-2023