1. Ibiranga irangi ry'umusemburo
Ugereranyije n'uburyo busanzwe bwo gusiga umwuka uva mu cyuma, gusiga umwuka uva mu cyuma gifite ibi bikurikira:
(1) Ikintu icyo ari cyo cyose gishobora gushonga, cyane cyane ahantu hanini ho gushonga, ibintu bishyuha cyane n'ibivanze. Igihe cyose ari ikintu gikomeye, cyaba icyuma, semiconductor, insulator, imvange n'ibindi, cyaba ari block, ibikoresho by'ibinyabutabire bishobora gukoreshwa nk'ibikoresho byibandwaho. Kubera ko gushonga no gucikamo ibice bike bibaho iyo ibikoresho byibasira ubushyuhe n'ibivanze nka okiside, bishobora gukoreshwa mu gutegura filime nto n'ibice by'ibivanze bifite ibice bisa n'iby'ibikoresho byibandwaho, ndetse na filime zikora cyane zifite imiterere igoye.' Byongeye kandi, uburyo bwo gushonga bushobora kandi gukoreshwa mu gukora filime z'ibivanze bitandukanye rwose n'ibikoresho byibandwaho, nka okiside, nitride, carbide na silicides.
(2) Gufatana neza hagati y’urupapuro rwaciwe n’urupapuro. Kubera ko ingufu za atome zaciwe ari 1-2 z’ubunini kurusha iza atome zaciwe, ihinduka ry’ingufu z’uduce dufite ingufu nyinshi tubikwa kuri uru rupapuro ritanga ingufu nyinshi z’ubushyuhe, ibyo byongera uburyo atome zaciwe zifatana n’urupapuro. Igice cya atome zaciwe zifite ingufu nyinshi zizashyirwa mu byiciro bitandukanye, bigakora urwego rwitwa pseudo-diffusion layer kuri uru rupapuro aho atome zaciwe n’atome z’ibikoresho bya substrate “bivangavanga”. Byongeye kandi, mu gihe cyo gutera uduce twaciwe, urupapuro ruhora rwozwa kandi rugakora mu gace ka plasma, ibyo bikuraho atome zaciwe nabi, bigasukura kandi bigakoresha ubuso bwa substrate. Kubera iyo mpamvu, gufatana kw’urupapuro rwaciwe kuri uru rupapuro kuri urwo rupapuro birarushaho kwiyongera.
(3) Ubucucike bwinshi bw'imyanda ipfundikiye, imyobo mike y'impini, n'ubuziranenge bwinshi bw'urwego rwa firime kuko nta kwanduza gukabije kubaho, ibyo bikaba bitakwirindwa mu gushyira umwuka uva mu cyuma mu gihe cyo gupfundikira imyanda.
(4) Uburyo bwiza bwo kugenzura no gusubiramo ubugari bwa firime. Kubera ko umuyoboro w'amazi usohoka n'umuyoboro w'amazi ushobora kugenzurwa ukwawo mu gihe cyo gusiga sputter, ubugari bwa firime bushobora kugenzurwa hakoreshejwe kugenzura umuyoboro w'amazi, bityo, uburyo bwo kugenzura ubugari bwa firime no kongera gukwirakwiza ubugari bwa firime binyuze mu gusiga sputter inshuro nyinshi ni byiza, kandi firime y'ubugari bwagenwe ishobora gusigwa neza. Byongeye kandi, uburyo bwo gusiga sputter bushobora kubona ubugari bwa firime bungana ahantu hanini. Ariko, ku ikoranabuhanga rusange ryo gusiga sputter (cyane cyane sputtering ya dipole), ibikoresho biragoye kandi bisaba igikoresho gishyushye cyane; umuvuduko wo gushyiraho firime yo gusiga sputter ni muto, igipimo cyo gushyira sputter mu mwuka ni 0.1 ~ 5nm / min, mu gihe igipimo cyo gusiga ari 0.01 ~ 0.5nm / min; kwiyongera k'ubushyuhe bwa substrate ni hejuru kandi bishobora kwangizwa na gaze y'umwanda, nibindi. Ariko, bitewe n'iterambere rya RF sputtering na magnetron sputtering, hari intambwe nini yabonetse mu kugera ku gusiga sputtering byihuse no kugabanya ubushyuhe bwa substrate. Byongeye kandi, mu myaka ya vuba aha, uburyo bushya bwo gusiga imyuka ihumanya burimo gukorwaho ubushakashatsi - bushingiye ku gusuka kwa magnetron mu buryo bwa planar - kugira ngo bigabanye umuvuduko w'umwuka uhumanya kugeza igihe usuka nta muvuduko aho umuvuduko w'umwuka utera mu gihe cyo gusuka uzaba zeru.
Igihe cyo kohereza: Ugushyingo-08-2022