Hangarau paninga pupuhi

1, Ngā āhuatanga o te paninga pupuhi
Ki te whakatauritea ki te paninga mimiti korehau tuku iho, ko ngā āhuatanga o te paninga pupuhi e whai ake nei:
(1) Ka taea te whakapūpū i tētahi matū, inā koa ngā huānga me ngā matū matūriki teitei te ira rewa, te iti te pēhanga o te kohu. Mēnā he totoka, ahakoa he konganuku, he haurua-ira, he ārai, he matūriki me te ranunga, me ētahi atu, ahakoa he poraka, ka taea te whakamahi i te rauemi kirikiri hei rauemi whāinga. Nā te mea he iti noa te pirau me te wehewehenga e puta ana i te wā e whakapūpū ana i ngā rauemi ārai me ngā koranu pēnei i te waikura, ka taea te whakamahi hei whakarite i ngā kiriata angiangi me ngā kiriata koranu me ngā wāhanga ōrite rite ki ērā o te rauemi whāinga, tae atu ki ngā kiriata superconducting me ngā hanganga uaua.´ Hei tāpiri, ka taea hoki te whakamahi i te tikanga whakapūpū tauhohe hei whakaputa kiriata o ngā matūriki he rerekē rawa atu i te rauemi whāinga, pēnei i te waikura, te nitrides, te carbides me te silicides.
(2) He pai te piri i waenga i te kiriata kua pakaru me te papa. Nā te mea he 1-2 ngā whakarea teitei ake te kaha o ngā ngota kua pakaru i tō ngā ngota kua mimiti, ko te hurihanga kaha o ngā matūriki kaha-teitei kua whakatakotoria ki runga i te papa ka whakaputa i te kaha wera teitei ake, e whakarei ake ana i te piri o ngā ngota kua pakaru ki te papa. Ka werohia tetahi wāhanga o ngā ngota kua pakaru kaha-teitei ki ngā taumata rerekē, ka hanga he paparanga pseudo-diffusion i runga i te papa, ka "ranua" ngā ngota kua pakaru me ngā ngota o te rauemi papa. Hei tāpiri, i te wā e pupuhihia ana ngā matūriki pakaru, ka horoia tonutia te papa me te whakahohe i roto i te rohe plasma, ka tangohia ngā ngota kua kore e piri pai, ka purea, ka whakahohe i te mata o te papa. Nō reira, ka tino whakarei ake te piri o te paparanga kiriata kua pakaru ki te papa.
(3) He nui te matotoru o te paninga pupuhi, he iti ake ngā kōhao iti, ā, he teitei ake te parakore o te paparanga kiriata nā te mea kāore he poke o te ipu para, he mea e kore e taea te karo i te whakatakotoranga o te kohu korehau i te wā o te tukanga paninga pupuhi.
(4) He pai te whakahaere me te whakahokinga o te matotoru o te kiriata. Nā te mea ka taea te whakahaere motuhake i te ia tuku me te ia ūnga i te wā e pania ana te sputter, ka taea te whakahaere i te matotoru o te kiriata mā te whakahaere i te ia ūnga, nō reira, he pai te whakahaere i te matotoru o te kiriata me te whakahokinga o te matotoru o te kiriata mā te sputtering maha o te paninga sputter, ā, ka taea te paninga pai i te kiriata kua whakaritea te matotoru. Hei tāpiri, ka taea e te paninga sputter te whiwhi i te matotoru kiriata ōrite ki runga i te wāhi nui. Heoi, mō te hangarau paninga sputter whānui (te nuinga o te sputtering dipole), he uaua ngā taputapu, ā, me whai taputapu pēhanga teitei; he iti te tere hanga kiriata o te whakatakotoranga sputter, ko te tere whakatakotoranga mimiti korehau he 0.1~5nm/min, ko te tere sputtering he 0.01~0.5nm/min; he teitei te pikinga o te pāmahana o te papa, ā, he ngoikore ki te hau poke, me ētahi atu. Heoi, nā te whanaketanga o te hangarau sputtering RF me te magnetron sputtering, kua nui te ahunga whakamua ki te whakatutuki i te whakatakotoranga sputtering tere me te whakaiti i te pāmahana o te papa. Heoi anō, i ngā tau tata nei, kei te rangahauhia ngā tikanga paninga hou mō te pupuhi – e ahu mai ana i te pupuhi magnetron planar – hei whakaiti i te pēhanga hau pupuhi tae noa ki te pupuhi kore-pēhanga, ka kore ai te pēhanga o te hau whakauru i te wā e pupuhi ana.