1, Zovala za sputter zokutira
Poyerekeza ndi zokutira wamba vacuum evaporation, zokutira sputtering ali ndi izi:
(1) Chilichonse chikhoza kutayidwa, makamaka malo osungunuka kwambiri, zinthu zotsika kwambiri za nthunzi ndi mankhwala.Malingana ngati ali olimba, kaya ndi chitsulo, semiconductor, insulator, pawiri ndi osakaniza, etc., kaya ndi chipika, granular zinthu zingagwiritsidwe ntchito ngati chandamale chandamale.Popeza kuwola pang'ono ndi kugawanika kumachitika pamene sputtering insulating zipangizo ndi aloyi monga oxides, iwo angagwiritsidwe ntchito kukonza mafilimu opyapyala ndi aloyi mafilimu ndi zigawo zikuluzikulu zofanana ndi za zinthu chandamale, ndipo ngakhale mafilimu superconducting ndi nyimbo zovuta. The reactive sputtering njira ingagwiritsidwenso ntchito kupanga mafilimu azinthu zosiyana kwambiri ndi zomwe mukufuna, monga ma oxides, nitrides, carbides ndi silicides.
(2) Kumamatira bwino pakati pa filimu yowonongeka ndi gawo lapansi.Popeza mphamvu ya maatomu sputtered ndi 1-2 madongosolo apamwamba kuposa maatomu chamunthuyo, mphamvu kutembenuka kwa mkulu-mphamvu particles waikamo pa gawo lapansi amapanga apamwamba matenthedwe mphamvu, amene timapitiriza adhesion wa sputtered maatomu kwa gawo lapansi.Gawo la maatomu amphamvu kwambiri omwe amatayika adzabayidwa mosiyanasiyana, ndikupanga otchedwa pseudo-diffusion wosanjikiza pa gawo lapansi pomwe maatomu ophwanyidwa ndi ma atomu a gawo lapansi "miscible" wina ndi mnzake.Komanso, pa bombardment wa sputtering particles, gawo lapansi nthawi zonse kutsukidwa ndi adamulowetsa mu plasma zone, amene amachotsa bwino amamatira mpweya maatomu, kuyeretsa ndi yambitsa gawo lapansi.Chotsatira chake, kumamatira kwa filimu yotayidwa ku gawo lapansi kumakulitsidwa kwambiri.
(3) Kuchulukana kwakukulu kwa zokutira za sputter, ma pibowo ochepa, komanso kuyera kwapamwamba kwa filimuyo chifukwa palibe kuipitsidwa ndi crucible, komwe sikungalephereke pakuyika kwa nthunzi wa vacuum panthawi yopaka sputter.
(4) Good controllability ndi repeatability wa makulidwe a filimu.Popeza kukhetsa kwapano ndi chandamale chapano kumatha kuwongoleredwa padera panthawi yopaka sputter, makulidwe a filimu amatha kuwongoleredwa poyang'anira chandamale chapano, motero, kuwongolera kwa makulidwe a filimuyo komanso kupangikanso kwa makulidwe a filimuyo ndi kupopera kambiri kwa zokutira kwa sputter ndizabwino. , ndipo filimu ya makulidwe okonzedweratu ikhoza kuphimbidwa bwino.Kuphatikiza apo, zokutira za sputter zimatha kupeza makulidwe a filimu yofananira pamalo akulu.Komabe, paukadaulo waukadaulo wa sputter (makamaka dipole sputtering), zida ndizovuta ndipo zimafunikira chipangizo choponderezedwa kwambiri;Kuthamanga kwa filimu kwa sputter deposition ndi kochepa, kutentha kwa mpweya wa vacuum ndi 0.1 ~ 5nm / min, pamene sputtering ndi 0.01 ~ 0.5nm / min;kutentha kwa gawo lapansi kumakhala kwakukulu komanso kosatetezeka ku gasi wodetsedwa, ndi zina zotero. Komabe, chifukwa cha chitukuko cha teknoloji ya RF sputtering ndi magnetron sputtering, kupita patsogolo kwakukulu kwapezeka pokwaniritsa kuyika kwa sputtering mofulumira ndi kuchepetsa kutentha kwa gawo lapansi.Komanso, m'zaka zaposachedwapa, njira zatsopano zokutira sputter zikufufuzidwa - kutengera planar magnetron sputtering - kuchepetsa sputtering mpweya mpweya mpaka zero-pressure sputtering kumene kupanikizika kwa gasi kudya pa sputtering adzakhala ziro.
Nthawi yotumiza: Nov-08-2022