1. Atụmatụ nke sputter mkpuchi
N'iji ya na mkpuchi ikuku evaporation nkịtị, mkpuchi sputtering nwere atụmatụ ndị a:
(1) Enwere ike ịgbasa ihe ọ bụla, ọkachasị ebe mgbaze dị elu, ihe nrụgide ikuku dị ala na ogige.Ọ bụrụhaala na ọ bụ ihe siri ike, ma ọ bụ ígwè, semiconductor, insulator, compound na ngwakọta, wdg, ma ọ bụ ngọngọ, a pụrụ iji ihe granular mee ihe dị ka ihe mgbaru ọsọ.Ebe ọ bụ na obere ire ere na nke irighiri ihe na-eme mgbe a na-awụsa ihe mkpuchi mkpuchi na alloys dị ka oxides, enwere ike iji ha kwadebe ihe nkiri ndị dị mkpa na ihe nkiri alloy nwere ihe ndị yiri nke ihe a na-achọsi ike, yana ọbụna ihe nkiri na-eme ihe nkiri nwere ihe mgbagwoju anya.' Na mgbakwunye, A pụkwara iji usoro ịgbasa mmeghachi omume na-emepụta ihe nkiri nke ogige dị iche iche na ihe a na-achọsi ike, dị ka oxides, nitrides, carbides na silicides.
(2) Ezi nrapado n'etiti ihe nkiri sputtered na mkpụrụ.Ebe ọ bụ na ike nke atom sputtered bụ 1-2 iwu nke ịdị ukwuu karịa nke atọm evaporated, ntughari ume nke ike dị elu nke etinyere na mkpụrụ ahụ na-emepụta ike ọkụ dị elu, nke na-eme ka adhesion nke atom na-agbapụta na mkpụrụ.A ga-agbanye akụkụ nke atom ndị nwere ume dị elu na ogo dị iche iche, na-akpụ ihe a na-akpọ pseudo-diffusion oyi akwa n'elu mkpụrụ ebe atom ndị na-agbapụta na atom nke ihe ndị na-emepụta ihe na-eme ka ha na-emekọrịta ihe.Na mgbakwunye, n'oge ogbunigwe nke ụmụ irighiri ihe na-efe efe, a na-ehicha mkpụrụ ahụ mgbe niile ma na-arụ ọrụ na mpaghara plasma, nke na-ewepụ atom ndị a na-ejighị n'aka, na-asachapụ ma na-arụ ọrụ n'elu ala.N'ihi ya, adhesion nke oyi akwa ihe nkiri a na-efesa na-eme ka ọ dịkwuo mma.
(3) Nnukwu njupụta nke mkpuchi sputter, obere pinholes, na ịdị ọcha dị elu nke oyi akwa ihe nkiri ahụ n'ihi na ọ dịghị ihe na-emerụ emerụ, bụ nke a na-apụghị izere ezere na ntinye oghere ikuku n'oge usoro mkpuchi sputter.
(4) Ezi njikwa na repeatability nke ihe nkiri ọkpụrụkpụ.Ebe ọ bụ na enwere ike ịchịkwa ntọhapụ ugbu a na nke ugbu a lekwasịrị anya iche iche n'oge mkpuchi sputter, enwere ike ịchịkwa ihe nkiri ahụ site n'ịchịkwa ihe dị ugbu a, ya mere, njikwa nke ihe nkiri ahụ na reproducibility nke ihe nkiri ahụ site na otutu sputtering nke mkpuchi sputter dị mma. , na ihe nkiri nke buru ibu buru ibu nwere ike kpuchie ya nke ọma.Na mgbakwunye, mkpuchi sputter nwere ike nweta ọkpụrụkpụ ihe nkiri edo edo karịa ebe buru ibu.Otú ọ dị, maka nkà na ụzụ mkpuchi sputter n'ozuzu (karịsịa dipole sputtering), ngwá ọrụ dị mgbagwoju anya ma na-achọ ngwaọrụ nrụgide dị elu;The film guzobe ọsọ nke sputter ntinye bụ ala, agụụ evaporation ntinye ọnụego bụ 0.1 ~ 5nm / min, mgbe sputtering ọnụego bụ 0.01 ~ 0.5nm / min;ịrị elu nke mkpụrụ osisi dị elu ma nwee ike ịnweta gas na-adịghị ọcha, wdg. Otú ọ dị, n'ihi mmepe nke RF sputtering na magnetron sputtering technology, a na-enweta ọganihu dị ukwuu n'inweta ntinye ngwa ngwa na ibelata okpomọkụ nke mkpụrụ.Ọzọkwa, n'ime afọ ndị na-adịbeghị anya, a na-enyocha ụzọ mkpuchi sputter ọhụrụ - dabere na atụmatụ magnetron sputtering - iji belata ikuku ikuku na-agbapụta ruo mgbe nkwụsị efu na-agbapụ ebe nrụgide nke gas oriri n'oge sputtering ga-abụ efu.
Oge nzipu: Nov-08-2022