Ikoreshwa rya tekinoroji

1 、 Ibiranga ibishishwa
Ugereranije na vacuum isanzwe ihumeka, gutwikisha ibintu bifite ibintu bikurikira ：
. Igihe cyose ari ikintu gikomeye, cyaba icyuma, semiconductor, insulator, ibivanze hamwe nuruvange, nibindi, byaba ari blok, ibikoresho bya granulaire birashobora gukoreshwa nkibikoresho bigenewe. Kubera ko kubora no gucikamo ibice bibaho mugihe cyo gusohora ibikoresho byokoresha insuline hamwe nuruvange nka okiside, birashobora gukoreshwa mugutegura firime yoroheje na firime zivanze hamwe nibice bimwe bisa nkibigenewe intego, ndetse na firime zidasanzwe zikoresha ibintu bigoye.´ Byongeye kandi, uburyo bwo gusohora ibintu bushobora no gukoreshwa mugukora firime yibintu bitandukanye cyane nibintu bigenewe, nka okiside, nitide, karide.
(2) Gufatanya neza hagati ya firime yasutswe na substrate. Kubera ko ingufu za atome zivanze ari 1-2 zingana nubunini burenze ubwa atome zahumutse, ihinduka ryingufu zingufu zingirakamaro zashyizwe kuri substrate zitanga ingufu zumuriro mwinshi, ibyo bikaba byongerera imbaraga za atome zivanze na substrate. Igice cya atome zifite ingufu nyinshi zisukuye zizaterwa inshinge zitandukanye, bigire icyo bita pseudo-diffusion layer kuri substrate aho atome zasakaye hamwe na atome yibikoresho bya substrate "bitumvikana" hamwe. Byongeye kandi, mugihe cya bombe yibisasu bitobora, substrate ihora isukurwa kandi igakorerwa muri zone ya plasma, ikuraho atome yaguye nabi, igasukura kandi igakora hejuru yubutaka. Nkigisubizo, gufatana kwa firime ya firime ya substrate byongerewe cyane.
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(4) Kugenzura neza no gusubiramo ubunini bwa firime. Kubera ko imyuka isohoka hamwe nintego zishobora kugenzurwa ukundi mugihe cyo gutwikisha sputter, uburebure bwa firime burashobora kugenzurwa no kugenzura icyerekezo cyerekanwe, bityo, kugenzura ubugari bwamafirime no kubyara kubyimbye bya firime ukoresheje uburyo bwinshi bwo gutwikisha ibintu ni byiza, kandi firime yubugari bwateganijwe irashobora gutwikirwa neza. Mubyongeyeho, ibishishwa bya sputter birashobora kubona uburebure bwa firime imwe ahantu hanini. Nyamara, kubijyanye na tekinoroji ya sputter rusange (cyane cyane dipole sputtering), ibikoresho biragoye kandi bisaba ibikoresho byumuvuduko mwinshi; umuvuduko wo gushiraho firime yo guta sputter ni muke, igipimo cyo guhumeka cya vacuum ni 0.1 ~ 5nm / min, mugihe igipimo cya 0.01 ~ 0.5nm / min; izamuka ry'ubushyuhe bwa substrate ni ryinshi kandi rishobora kwibasirwa na gaze yanduye, nibindi. Ariko rero, kubera iterambere rya tekinoroji ya RF hamwe na tekinoroji ya magnetron, intambwe nini imaze guterwa mugushira vuba vuba no kugabanya ubushyuhe bwa substrate. Byongeye kandi, mu myaka yashize, hakorwa iperereza ku buryo bushya bwo gusiga - bushingiye kuri planar magnetron - kugira ngo hagabanuke umuvuduko w’ikirere kugeza igihe umuvuduko wa zeru utangiriye aho umuvuduko wa gaze yo gufata mu gihe cyo gusohora uzaba zeru.